Hydrogen dissociation in a microwave discharge for diamond deposition

The gas phase densities of CH3 and CH and the hydrogen dissociation fraction are measured in a hot filament diamond deposition system for each of several different hydrocarbon input gases. The crystal growth rate and the appearance of the diamond grown from the different input gases are also examined. A comparison of the measurements indicates that the nature of the input hydrocarbon is relatively unimportant because fast gas phase reactions completely scramble the identities of the input carbon atoms. The addition of oxygen greatly alters the gas phase densities and other experimental factors such as the filament surface condition. Small concentrations of atomic impurities in the gas phase are also detected using high sensitivity absorption spectroscopy.

Download Full-text

Hydrogen dissociation on hot tantalum and tungsten filaments under diamond deposition conditions

Journal of Applied Physics ◽

10.1063/1.359015 ◽

1995 ◽

Vol 77 (2) ◽

pp. 893-898 ◽

Cited By ~ 28

Author(s):

Toru Otsuka ◽

Manabu Ihara ◽

Hiroshi Komiyama

Keyword(s):

Diamond Deposition ◽

Hydrogen Dissociation ◽

Tungsten Filaments ◽

Deposition Conditions ◽

And Tungsten

Download Full-text

High rate diamond deposition using a microwave discharge

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677738 ◽

2002 ◽

Author(s):

W.S. Huang ◽

K.P. Kuo ◽

J. Mossbrucker ◽

J. Asmussen ◽

U. Kahler ◽

...

Keyword(s):

Microwave Discharge ◽

High Rate ◽

Diamond Deposition

Download Full-text

Контракция микроволнового разряда в реакторе для газофазного осаждения алмаза

Письма в журнал технической физики ◽

10.21883/pjtf.2019.03.47269.17585 ◽

2019 ◽

Vol 45 (3) ◽

pp. 30

Author(s):

С.А. Богданов ◽

А.М. Горбачев ◽

Д.Б. Радищев ◽

А.Л. Вихарев ◽

М.А. Лобаев

Keyword(s):

Emission Intensity ◽

Microwave Discharge ◽

Microwave Plasma ◽

Plasma Reactor ◽

Optical Emission ◽

Spatial Distributions ◽

Threshold Pressure ◽

Gas Temperature ◽

Diamond Deposition ◽

Methane Mixture

AbstractIt was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.

Download Full-text