High rate diamond deposition using a microwave discharge

Author(s):  
W.S. Huang ◽  
K.P. Kuo ◽  
J. Mossbrucker ◽  
J. Asmussen ◽  
U. Kahler ◽  
...  
2021 ◽  
Vol 56 (1) ◽  
pp. 106-115
Author(s):  
A. A. Emel’yanov ◽  
M. Yu. Plotnikov ◽  
A. K. Rebrov ◽  
N. I. Timoshenko ◽  
I. B. Yudin

1993 ◽  
Vol 2 (1) ◽  
pp. 25-35 ◽  
Author(s):  
C.Robert Koemtzopoulos ◽  
Demetre J. Economou ◽  
Richard Pollard

Author(s):  
С.А. Богданов ◽  
А.М. Горбачев ◽  
Д.Б. Радищев ◽  
А.Л. Вихарев ◽  
М.А. Лобаев

AbstractIt was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.


2002 ◽  
Vol 11 (7) ◽  
pp. 1337-1343 ◽  
Author(s):  
Seung-Doh Shin ◽  
Nong M. Hwang ◽  
Doh-Yeon Kim

Author(s):  
L. E. Murr ◽  
G. Wong

Palladium single-crystal films have been prepared by Matthews in ultra-high vacuum by evaporation onto (001) NaCl substrates cleaved in-situ, and maintained at ∼ 350° C. Murr has also produced large-grained and single-crystal Pd films by high-rate evaporation onto (001) NaCl air-cleaved substrates at 350°C. In the present work, very large (∼ 3cm2), continuous single-crystal films of Pd have been prepared by flash evaporation onto air-cleaved (001) NaCl substrates at temperatures at or below 250°C. Evaporation rates estimated to be ≧ 2000 Å/sec, were obtained by effectively short-circuiting 1 mil tungsten evaporation boats in a self-regulating system which maintained an optimum load current of approximately 90 amperes; corresponding to a current density through the boat of ∼ 4 × 104 amperes/cm2.


Author(s):  
A. Elgsaeter ◽  
T. Espevik ◽  
G. Kopstad

The importance of a high rate of temperature decrease (“rapid freezing”) when freezing specimens for freeze-etching has long been recognized1. The two basic methods for achieving rapid freezing are: 1) dropping the specimen onto a metal surface at low temperature, 2) bringing the specimen instantaneously into thermal contact with a liquid at low temperature and subsequently maintaining a high relative velocity between the liquid and the specimen. Over the last couple of years the first method has received strong renewed interest, particularily as the result of a series of important studies by Heuser and coworkers 2,3. In this paper we will compare these two freezing methods theoretically and experimentally.


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