The principles of tandem scanning reflected light microscopy and the design of recent instruments are fully described elsewhere and here only briefly. The illuminating light is intercepted by a rotating aperture disc which lies in the intermediate focal plane of a standard LM objective. This device provides an array of separate scanning beams which light up corresponding patches in the plane of focus more intensely than out of focus layers. Reflected light from these patches is imaged on to a matching array of apertures on the opposite side of the same aperture disc and which are scanning in the focal plane of the eyepiece. An arrangement of mirrors converts the central symmetry of the disc into congruency, so that the array of apertures which chop the illuminating beam is identical with the array on the observation side. Thus both illumination and “detection” are scanned in tandem, giving rise to the name Tandem Scanning Microscope (TSM). The apertures are arranged on Archimedean spirals: each opposed pair scans a single line in the image.
Curvature measurement with reflected-light microscopy and its application to fly facet lenses
