Since Technology Computer Aided Design (TCAD) is an important component of modern semiconductor manufacturing, a new framework is needed for microelectronics education. An integrated measurement-based microelectronics and VLSI engineering laboratory with simulation-based technology CAD laboratory is described. An Internet-based laboratory management system for monitoring and control of a real-time measurement system interfaced via a dedicated local computer is discussed. The management system allows the remote students to conduct remote experiments, perform monitoring and control of the experimental setup, and collect data from the experiment through the network link as if the student is physically in a conventional laboratory. The management system is also capable of evaluating of a student’s performance and grading laboratory courses that involve preliminary quiz and viva-voce examinations, checking of experimental data and submitted online laboratory reports. The proposed online TCAD teaching methodology will provide an opportunity for expanding microelectronics education.
