In situ stress measurements of metal oxide thin films

2018 ◽  
pp. 109-132 ◽  
Author(s):  
A. Fluri ◽  
C.W. Schneider ◽  
D. Pergolesi
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
In Situ Stress ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Stress Measurements ◽  
In Situ Stress Measurements

In-Situ Stress Measurements on Amorphous Germanium Thin Films

1993 ◽  
Vol 137 (1) ◽  
pp. K17-K19
Author(s):  
N. Balasundaram ◽  
D. Mangalaraj ◽  
Sa. K. Narayandass ◽  
C. Balasubramanian
Keyword(s):  
Thin Films ◽  
In Situ Stress ◽  
Amorphous Germanium ◽  
Stress Measurements ◽  
In Situ Stress Measurements

scholarly journals Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Ufuk Kilic ◽  
Alyssa Mock ◽  
Derek Sekora ◽  
Simeon Gilbert ◽  
Shah Valloppilly ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Metal Oxide ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
Surface Interactions ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Layer Deposition

An amendment to this paper has been published and can be accessed via a link at the top of the paper.

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition
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