HIGH QUALITY THIN FILM FORMATION WITH GAS CLUSTER ION BEAM ASSISTED DEPOSITION SYSTEM

2005 ◽  
pp. 235-239
Author(s):  
Y. Fujiwara ◽  
S. Inoue ◽  
T. Nose ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
High Quality ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Optical thin film formation by gas-cluster ion beam assisted deposition

1999 ◽  
Author(s):  
H. Katsumata ◽  
J. Matsuo ◽  
T. Nishihara ◽  
T. Tachibana ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

MgF2 and LaF3 thin film formation with gas cluster ion beam assisted deposition

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8620-8623 ◽  
Author(s):  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

High quality optical thin film deposition with gas cluster ion beam assisted deposition

2004 ◽  
Author(s):  
Noriaki Toyoda ◽  
Isao Yamada ◽  
Shunsuke Niisaka ◽  
Masatoshi Sato
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
High Quality ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Diamond-like carbon thin film formation by ion-beam-assisted deposition

1994 ◽  
Vol 66 (1-3) ◽  
pp. 514-518 ◽  
Author(s):  
Yoshinori Funada ◽  
Kaoru Awazu ◽  
Kisaburo Shimamura ◽  
Hiroshi Watanabe ◽  
Masaya Iwaki
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Assisted Deposition ◽  
Carbon Thin Film ◽  
Thin Film Formation

Hard DLC film formation by gas cluster ion beam assisted deposition

2003 ◽  
Vol 201 (2) ◽  
pp. 405-412 ◽  
Author(s):  
Teruyuki Kitagawa ◽  
Isao Yamada ◽  
Noriaki Toyoda ◽  
Harushige Tsubakino ◽  
Jiro Matsuo ◽  
...  
Keyword(s):  
Film Formation ◽  
Ion Beam ◽  
Dlc Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam
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