Contactless magnetic position sensors are used in countless industrial and automotive applications. However, as a consequence of the electrification trend the sensors can be exposed to parasitic magnetic stray fields, and their desired robustness may be compromised. In this paper we publish for the first time how this challenge is addressed and constructively solved using a complete paradigm change leaving conventional magnetic field measurement behind and entering into the realm of magnetic field gradient measurement. Our novel sensor system consists of an integrated Hall sensor realized in 0.18 μm CMOS technology with magnetic concentrators and a four-pole permanent magnet. The intrinsic angular accuracy was assessed comparing the rotary position of the permanent magnet with the sensor output showing angle errors below 0.3°. Additional end-of-line calibration can be applied using built-in memory and processing capability to further increase the accuracy. Finally, we demonstrate the immunity against stray fields of 4000 A/m which led to errors below 0.1°, corresponding to 0.06% of the sensors fullscale angular range. In conclusion, this novel sensor system offers a compact and flexible solution for stray-field immune rotary position measurement in harsh environment.
Fabrication of Three-Dimensional Position-Measurement Sensor Using a Single-Axis Coil
