Ultra-short pulsed laser ablation of silicon nitride layers: Investigation near threshold fluence
2013 ◽
Vol 278
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pp. 265-267
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2002 ◽
Vol 20
(1)
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pp. 30-32
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1991 ◽
Vol 49
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pp. 1068-1069
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2021 ◽
Vol 114
(3-4)
◽
pp. 883-897
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