Silicon surface passivation using thin HfO2 films by atomic layer deposition

2015 ◽  
Vol 357 ◽  
pp. 635-642 ◽  
Author(s):  
Jhuma Gope ◽  
Vandana ◽  
Neha Batra ◽  
Jagannath Panigrahi ◽  
Rajbir Singh ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation

scholarly journals Silicon Surface Passivation by Mixed Aluminum Precursors in Al2O3 Atomic Layer Deposition

2016 ◽  
Vol 92 ◽  
pp. 304-308 ◽  
Author(s):  
Yameng Bao ◽  
Haibing Huang ◽  
Zhen Zhu ◽  
Jun Lv ◽  
Hele Savin
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation ◽  
Aluminum Precursors

Novel Silicon Surface Passivation by Al2O3/ZnO/Al2O3 Films Prepared by Atomic Layer Deposition

2013 ◽  
Author(s):  
K.S. Jeong ◽  
S.H. Kim ◽  
H.R. Lee ◽  
K.M. Han ◽  
H.Y. Park ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation

Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition

2010 ◽  
Vol 4 (1-2) ◽  
pp. 10-12 ◽  
Author(s):  
G. Dingemans ◽  
R. Seguin ◽  
P. Engelhart ◽  
M. C. M. van de Sanden ◽  
W. M. M. Kessels
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation

Silicon Surface Passivation by ALD-Ga2O3: Thermal vs. Plasma-Enhanced Atomic Layer Deposition

2020 ◽  
Vol 10 (4) ◽  
pp. 959-968
Author(s):  
Daniel Hiller ◽  
Jaakko Julin ◽  
Ahmed Chnani ◽  
Steffen Strehle
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation

Novel silicon surface passivation by Al2O3/ZnO/Al2O3films deposited by thermal atomic layer deposition

2014 ◽  
Vol 53 (4S) ◽  
pp. 04ER19 ◽  
Author(s):  
Kwang-Seok Jeong ◽  
Sung-Kwen Oh ◽  
Hong-Sik Shin ◽  
Ho-Jin Yun ◽  
Seong-Hyeon Kim ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Surface ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silicon Surface Passivation

scholarly journals Surface Passivation of Organometal Halide Perovskite by Atomic Layer Deposition: a Mechanism Investigation Enabling Efficient Inverted Planar Solar Cells

2021 ◽  
Author(s):  
Ran Zhao ◽  
Kai Zhang ◽  
Jiahao Zhu ◽  
Shuang Xiao ◽  
Wei Xiong ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atomic Layer Deposition ◽  
High Efficiency ◽  
Surface Passivation ◽  
Perovskite Solar Cells ◽  
Wide Band ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Halide Perovskite ◽  
Interface Passivation

Interface passivation is of the pivot to achieve high-efficiency organic metal halide perovskite solar cells (PSCs). Atomic layer deposition (ALD) of wide band gap oxides has recently shown great potential...

scholarly journals Atomic layer deposited dielectric and/or semiconducting oxide bilayers for crystalline silicon surface passivation

2017 ◽  
Vol 124 ◽  
pp. 302-306 ◽  
Author(s):  
Jagannath Panigrahi ◽  
Vandana Panwar ◽  
Rajbir Singh ◽  
P.K. Singh
Keyword(s):  
Silicon Surface ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Atomic Layer ◽  
Silicon Surface Passivation

scholarly journals Surface Passivation of MoO3 Nanorods by Atomic Layer Deposition toward High Rate Durable Li Ion Battery Anodes

2015 ◽  
Vol 7 (24) ◽  
pp. 13154-13163 ◽  
Author(s):  
B. Ahmed ◽  
Muhammad Shahid ◽  
D. H. Nagaraju ◽  
D. H. Anjum ◽  
Mohamed N. Hedhili ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Surface Passivation ◽  
Atomic Layer ◽  
High Rate ◽  
Li Ion Battery ◽  
Layer Deposition ◽  
Li Ion
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