Enhanced electrical properties of dual-layer channel ZnO thin film transistors prepared by atomic layer deposition

2018 ◽  
Vol 439 ◽  
pp. 632-637 ◽  
Author(s):  
Huijin Li ◽  
Dedong Han ◽  
Junchen Dong ◽  
Wen Yu ◽  
Yi Liang ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

scholarly journals Effects of the Al2O3interlayer in ZnO thin-film transistors fabricated via atomic layer deposition

2013 ◽  
Vol 14 (2) ◽  
pp. 61-65 ◽  
Author(s):  
Seong-Hyeon Kim ◽  
Kwang-Seok Jeong ◽  
Ga-Won Lee ◽  
Hi-Deok Lee
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Microwave Annealing as a Low Thermal Budget Technique for ZnO Thin-Film Transistors Fabricated Using Atomic Layer Deposition

2017 ◽  
Vol 38 (10) ◽  
pp. 1390-1393 ◽  
Author(s):  
Lei Yue ◽  
Chao-Chao Fu ◽  
Feng Sun ◽  
Zhi-Jun Qiu ◽  
Shi-Li Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Thermal Budget ◽  
Microwave Annealing ◽  
Layer Deposition ◽  
Low Thermal Budget

Vertical Channel ZnO Thin-Film Transistors Using an Atomic Layer Deposition Method

2014 ◽  
Vol 35 (3) ◽  
pp. 360-362 ◽  
Author(s):  
Chi-Sun Hwang ◽  
Sang-Hee Ko Park ◽  
Himchan Oh ◽  
Min-Ki Ryu ◽  
Kyoung-Ik Cho ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Vertical Channel ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Deposition Method ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method

Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors

2010 ◽  
Vol 16 (6) ◽  
pp. 953-958 ◽  
Author(s):  
Su Cheol Gong ◽  
Seokhwan Bang ◽  
Hyeongtag Jeon ◽  
Hyung-Ho Park ◽  
Young Chul Chang ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Films ◽  
Layer Deposition ◽  
Structural And Electrical Properties
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