Microwave Annealing as a Low Thermal Budget Technique for ZnO Thin-Film Transistors Fabricated Using Atomic Layer Deposition

2017 ◽  
Vol 38 (10) ◽  
pp. 1390-1393 ◽  
Author(s):  
Lei Yue ◽  
Chao-Chao Fu ◽  
Feng Sun ◽  
Zhi-Jun Qiu ◽  
Shi-Li Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Thermal Budget ◽  
Microwave Annealing ◽  
Layer Deposition ◽  
Low Thermal Budget

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Vertical Channel ZnO Thin-Film Transistors Using an Atomic Layer Deposition Method

2014 ◽  
Vol 35 (3) ◽  
pp. 360-362 ◽  
Author(s):  
Chi-Sun Hwang ◽  
Sang-Hee Ko Park ◽  
Himchan Oh ◽  
Min-Ki Ryu ◽  
Kyoung-Ik Cho ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Vertical Channel ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Deposition Method ◽  
Layer Deposition ◽  
Atomic Layer Deposition Method

Stable and High-Performance Flexible ZnO Thin-Film Transistors by Atomic Layer Deposition

2015 ◽  
Vol 7 (40) ◽  
pp. 22610-22617 ◽  
Author(s):  
Yuan-Yu Lin ◽  
Che-Chen Hsu ◽  
Ming-Hung Tseng ◽  
Jing-Jong Shyue ◽  
Feng-Yu Tsai
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition
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