Wideband anti-reflective silicon surface structures fabricated by femtosecond laser texturing

2018 ◽  
Vol 459 ◽  
pp. 86-91 ◽  
Author(s):  
Vinod Parmar ◽  
Yung C. Shin
Keyword(s):  
Femtosecond Laser ◽  
Silicon Surface ◽  
Surface Structures ◽  
Laser Texturing

Fabrication and Characterization of Si Nano-Columns by Femtosecond Laser

2012 ◽  
Vol 16 ◽  
pp. 15-20 ◽  
Author(s):  
Omid Tayefeh Ghalehbeygi ◽  
Vural Kara ◽  
Levent Trabzon ◽  
Selcuk Akturk ◽  
Huseyin Kizil
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Laser Beam ◽  
Chemical Etching ◽  
Silicon Surface ◽  
Laser Pulses ◽  
Laser Beam Profile ◽  
Fs Laser ◽  
Fabrication And Characterization

We fabricated Si Nano-columns by a femtosecond laser with various wavelengths and process parameters, whilst the specimen was submerged in water. The experiments were carried out by three types of wavelengths i.e. 1030 nm, 515nm, 343nm, with 500 fs laser pulses. The scales of these spikes are much smaller than micro spikes that are constructed by laser irradiation of silicon surface in vacuum or gases like SF6, Cl2. The Si nano-columns of 300 nm or less in width were characterized by SEM measurements. The formation of these Si Nano-columns that were revealed by SEM observation, indicates chemical etching with laser ablation occurred when surface exposed by laser beam. We observed 200 nm spikes height at the center of laser beam profile and the ones uniform in height at lateral incident area.

Three-dimensional SiO2 surface structures fabricated using femtosecond laser lithography

2009 ◽  
Vol 98 (1) ◽  
pp. 171-177 ◽  
Author(s):  
Mizue Mizoshiri ◽  
Hiroaki Nishiyama ◽  
Junji Nishii ◽  
Yoshinori Hirata
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Surface Structures ◽  
Sio2 Surface ◽  
Laser Lithography

Diffraction on a Microbubble and the Morphology of the Silicon Surface Irradiated through Glycerol by a Pair of Femtosecond Laser Pulses

JETP Letters ◽  
2021 ◽  
Vol 113 (2) ◽  
pp. 75-81
Author(s):  
N. A. Inogamov ◽  
S. A. Romashevskiy ◽  
A. I. Ignatov ◽  
V. V. Zhakhovsky ◽  
V. A. Khokhlov ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Silicon Surface ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Third harmonic generation on silicon surface induced by femtosecond laser

2019 ◽  
Vol 111 ◽  
pp. 255-261 ◽  
Author(s):  
Xiaoming Lin ◽  
Xiaohong Li ◽  
Yanbin Zhang ◽  
Yuxiao Hou ◽  
Xueying Liu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Harmonic Generation ◽  
Silicon Surface ◽  
Third Harmonic Generation ◽  
Third Harmonic

scholarly journals High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity

2017 ◽  
Vol 7 (1) ◽  
Author(s):  
Iaroslav Gnilitskyi ◽  
Thibault J.-Y. Derrien ◽  
Yoann Levy ◽  
Nadezhda M. Bulgakova ◽  
Tomáš Mocek ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
High Speed ◽  
Surface Structures ◽  
Physical Origin ◽  
Periodic Surface
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