Annealing temperature dependent on structural, optical and electrical properties of indium oxide thin films deposited by electron beam evaporation method

2010 ◽  
Vol 10 (3) ◽  
pp. 880-885 ◽  
Author(s):  
V. Senthilkumar ◽  
P. Vickraman
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electrical Properties ◽  
Indium Oxide ◽  
Annealing Temperature ◽  
Electron Beam Evaporation ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Temperature Dependent ◽  
Evaporation Method

Structural, optical, and electrical properties of tin sulfide thin films grown with electron-beam evaporation

2015 ◽  
Vol 15 (9) ◽  
pp. 964-969 ◽  
Author(s):  
Hui Kyung Park ◽  
Jaeseung Jo ◽  
Hee Kyeung Hong ◽  
Gwang Yeom Song ◽  
Jaeyeong Heo
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electrical Properties ◽  
Electron Beam Evaporation ◽  
Tin Sulfide ◽  
Optical And Electrical Properties

Optical and electrical properties of TiOx thin films deposited by electron beam evaporation

Vacuum ◽  
2007 ◽  
Vol 81 (9) ◽  
pp. 1023-1028 ◽  
Author(s):  
Jianke Yao ◽  
Jianda Shao ◽  
Hongbo He ◽  
Zhengxiu Fan
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electrical Properties ◽  
Electron Beam Evaporation ◽  
Optical And Electrical Properties

Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films

2009 ◽  
Vol 79-82 ◽  
pp. 787-790
Author(s):  
Ti Ning ◽  
Feng Ji ◽  
Jin Ma ◽  
Zhen Guo Song ◽  
Xu An Pei ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Perovskite Structure ◽  
Annealing Temperature ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Thermal Probe ◽  
P Type

Copper-tin-oxide thin films have been prepared on quartz substrates by the magnetron sputtering method. The structural,optical and electrical properties were investigated. The prepared samples were amorphous, CuSnO3 single crystalline grains with perovskite structure were observed after annealing temperature was above 530°C. The optical and electrical properties had great dependence with reactive gas pressure and annealing temperature. Thermal probe reveals p type conductivity of some samples. Keywords: Magnetron sputtering, CuSnO3, Perovskite structure

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