Research on mechanism of nanoscale cutting with arc trajectory for monocrystalline silicon based on molecular dynamics simulation

2019 ◽  
Vol 170 ◽  
pp. 109175 ◽  
Author(s):  
Qiang Kang ◽  
Xudong Fang ◽  
Lin Sun ◽  
Jianjun Ding ◽  
Zhuangde Jiang
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