High-density plasma chemical vapor deposition of amorphous carbon films
2004 ◽
Vol 13
(2)
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pp. 311-315
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2008 ◽
Vol 255
(5)
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pp. 1836-1840
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2001 ◽
Vol 19
(4)
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pp. 1577-1581
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2003 ◽
Vol 34
(5-8)
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pp. 627-629
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2006 ◽
Vol 15
(11-12)
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pp. 1894-1897
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2003 ◽
Vol 5
(6)
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pp. 2063-2070
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2002 ◽
Vol 20
(4)
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pp. 1481-1485
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2013 ◽
Vol 22
(1)
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pp. 31-36