High density plasma chemical vapor deposition of diamond-like carbon films
2003 ◽
Vol 34
(5-8)
◽
pp. 627-629
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2004 ◽
Vol 13
(2)
◽
pp. 311-315
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2009 ◽
Vol 203
(9)
◽
pp. 1193-1198
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1995 ◽
Vol 142
(11)
◽
pp. L208-L211
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2007 ◽
Vol 154
(5)
◽
pp. G122
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2002 ◽
Vol 41
(Part 1, No. 4A)
◽
pp. 1974-1980
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1999 ◽
Vol 43
(1.2)
◽
pp. 109-126
◽
1998 ◽
Vol 16
(3)
◽
pp. 1123
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2010 ◽
Vol 49
(7)
◽
pp. 075501
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