Deposition of silicon-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition using an intermittent supply of organosilane
2015 ◽
Vol 51
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pp. 7-13
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Keyword(s):
2011 ◽
Vol 206
(5)
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pp. 1011-1015
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2010 ◽
Vol 42
(12-13)
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pp. 1702-1705
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Keyword(s):
2013 ◽
Vol 52
(11R)
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pp. 110123
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Keyword(s):
Keyword(s):
2013 ◽
Vol 264
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pp. 625-632
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Keyword(s):
2000 ◽
Vol 9
(12)
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pp. 2024-2030
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2010 ◽
Vol 49
(7)
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pp. 075501
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1994 ◽
Vol 4
(1)
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pp. 69-75
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Keyword(s):