Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation
2009 ◽
Vol 203
(17-18)
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pp. 2721-2726
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2006 ◽
Vol 15
(9)
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pp. 1276-1281
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2007 ◽
Vol 16
(8)
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pp. 1490-1499
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Keyword(s):
2015 ◽
Vol 365
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pp. 357-361
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2007 ◽
Vol 201
(15)
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pp. 6643-6646
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2007 ◽
Vol 257
(1-2)
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pp. 692-695
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2017 ◽
Vol 312
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pp. 47-54
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2004 ◽
Vol 230
(1-4)
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pp. 172-178
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2009 ◽
Vol 204
(3)
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pp. 229-236
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