Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation

W. Ensinger

doi:10.1016/j.surfcoat.2009.02.101

Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.02.101 ◽

2009 ◽

Vol 203 (17-18) ◽

pp. 2721-2726 ◽

Cited By ~ 22

Author(s):

W. Ensinger

Keyword(s):

Ion Implantation ◽

Process Parameters ◽

Carbon Films ◽

Diamond Like Carbon ◽

Film Properties ◽

Plasma Immersion Ion Implantation

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Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation

Journal of End-to-End-testing ◽

10.1016/j.endend.2009.03.101 ◽

2008 ◽

Vol 31 (02) ◽

pp. 1031-1040

Author(s):

W. Ensinger

Keyword(s):

Ion Implantation ◽

Process Parameters ◽

Carbon Films ◽

Diamond Like Carbon ◽

Film Properties ◽

Plasma Immersion Ion Implantation

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Characteristics and surface energy of silicon-doped diamond-like carbon films fabricated by plasma immersion ion implantation and deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2005.09.042 ◽

2006 ◽

Vol 15 (9) ◽

pp. 1276-1281 ◽

Cited By ~ 39

Author(s):

G.J. Wan ◽

P. Yang ◽

Ricky K.Y. Fu ◽

Y.F. Mei ◽

T. Qiu ◽

...

Keyword(s):

Surface Energy ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation ◽

Silicon Doped

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Structure and topographies of diamond-like carbon films produced on tungsten pre-implanted stainless steel substrate by plasma immersion ion implantation and deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2006.12.028 ◽

2007 ◽

Vol 16 (8) ◽

pp. 1490-1499 ◽

Cited By ~ 6

Author(s):

Ming Xu ◽

Jun Zhao ◽

Xun Cai ◽

Qiulong Chen ◽

Paul K. Chu

Keyword(s):

Stainless Steel ◽

Ion Implantation ◽

Stainless Steel Substrate ◽

Steel Substrate ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation

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Calcium doped diamond-like carbon films fabricated by plasma immersion ion implantation

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1340077 ◽

2004 ◽

Author(s):

S.C.H. Kwok ◽

P.K. Chu ◽

M.M.M. Bilek ◽

D.R. McKenzie

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation ◽

Calcium Doped

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Modification of diamond-like carbon films by nitrogen incorporation via plasma immersion ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2015.07.084 ◽

2015 ◽

Vol 365 ◽

pp. 357-361 ◽

Cited By ~ 13

Author(s):

S. Flege ◽

R. Hatada ◽

M. Hoefling ◽

A. Hanauer ◽

A. Abel ◽

...

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Nitrogen Incorporation ◽

Plasma Immersion Ion Implantation

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Characteristics of phosphorus-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII and D)

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.09.026 ◽

2007 ◽

Vol 201 (15) ◽

pp. 6643-6646 ◽

Cited By ~ 8

Author(s):

S.C.H. Kwok ◽

G.J. Wan ◽

J.P.Y. Ho ◽

P.K. Chu ◽

M.M.M. Bilek ◽

...

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation ◽

Phosphorus Doped

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Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2007.01.073 ◽

2007 ◽

Vol 257 (1-2) ◽

pp. 692-695 ◽

Cited By ~ 7

Author(s):

W. Ensinger ◽

K. Volz ◽

K. Baba ◽

R. Hatada

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation

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Magnetic-field enhanced plasma immersion ion implantation and deposition (PIII&D) of diamond-like carbon films inside tubes

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2016.08.077 ◽

2017 ◽

Vol 312 ◽

pp. 47-54 ◽

Cited By ~ 11

Author(s):

Samantha de Fátima Magalhães Mariano ◽

Mario Ueda ◽

Rogério Moraes Oliveira ◽

Elver Juan de Dios Mitma Pillaca ◽

Nazir Monteiro dos Santos

Keyword(s):

Magnetic Field ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation

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Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII–D)

Applied Surface Science ◽

10.1016/j.apsusc.2004.02.044 ◽

2004 ◽

Vol 230 (1-4) ◽

pp. 172-178 ◽

Cited By ~ 42

Author(s):

Zh.Q Yao ◽

P Yang ◽

N Huang ◽

H Sun ◽

J Wang

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Hydrophobic Properties ◽

Plasma Immersion Ion Implantation

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Plasma immersion ion implantation induced improvements of mechanical properties, wear resistance, and adhesion of diamond-like carbon films deposited on tool steel

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.06.033 ◽

2009 ◽

Vol 204 (3) ◽

pp. 229-236 ◽

Cited By ~ 10

Author(s):

Kuan-Wei Chen ◽

Jen-Fin Lin ◽

Wen-Fa Tsai ◽

Chi-Fong Ai

Keyword(s):

Mechanical Properties ◽

Wear Resistance ◽

Ion Implantation ◽

Tool Steel ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation

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