The matrix effect in organic secondary ion mass spectrometry

2015 ◽  
Vol 377 ◽  
pp. 599-609 ◽  
Author(s):  
Alexander G. Shard ◽  
Steve J. Spencer ◽  
Steve A. Smith ◽  
Rasmus Havelund ◽  
Ian S. Gilmore
Keyword(s):  
Mass Spectrometry ◽  
Matrix Effect ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
The Matrix ◽  
Secondary Ion

Reducing the Matrix Effect in Molecular Secondary Ion Mass Spectrometry by Laser Post-Ionization

2017 ◽  
Vol 121 (36) ◽  
pp. 19705-19715 ◽  
Author(s):  
Lars Breuer ◽  
Nicholas J. Popczun ◽  
Andreas Wucher ◽  
Nicholas Winograd
Keyword(s):  
Mass Spectrometry ◽  
Matrix Effect ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
The Matrix ◽  
Secondary Ion

Measurement of InxGa1-xN and AlxGa1-xN Compositions by RBS and SIMS

1997 ◽  
Vol 468 ◽  
Author(s):  
Y. Gao ◽  
J. Kirchhoff ◽  
S. Mitha ◽  
J. W. Erickson ◽  
C. Huang ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Quantum Well ◽  
Matrix Effect ◽  
Secondary Ion Mass Spectrometry ◽  
Rutherford Backscattering Spectrometry ◽  
Compositional Analysis ◽  
Analytical Technique ◽  
The Matrix ◽  
Sims Analysis ◽  
Secondary Ion

ABSTRACTSecondary ion mass spectrometry (SIMS) and Rutherford Backscattering Spectrometry (RBS) techniques were used to determine InxGa1-xN and AlxGa1-xN compositions. While RBS is generally considered a quantitative technique for compositional analysis, SIMS has not been. We have applied a new analytical technique, which reduces the matrix effect in SIMS analysis, to accurately determine stoichiometry. The composition of InxGa1-xN (AlxGa1-xN) in the multiple layers and quantum well of the LED can be measured by SIMS, but is inaccessible to RBS.

Applications of Time-OF-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

1990 ◽  
Vol 48 (2) ◽  
pp. 308-309
Author(s):  
Bruno Schueler ◽  
Robert W. Odom
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Structural Information ◽  
Time Of Flight ◽  
Biological Tissues ◽  
Polymer Surfaces ◽  
Tof Sims ◽  
Secondary Ions ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) provides unique capabilities for elemental and molecular compositional analysis of a wide variety of surfaces. This relatively new technique is finding increasing applications in analyses concerned with determining the chemical composition of various polymer surfaces, identifying the composition of organic and inorganic residues on surfaces and the localization of molecular or structurally significant secondary ions signals from biological tissues. TOF-SIMS analyses are typically performed under low primary ion dose (static SIMS) conditions and hence the secondary ions formed often contain significant structural information.This paper will present an overview of current TOF-SIMS instrumentation with particular emphasis on the stigmatic imaging ion microscope developed in the authors’ laboratory. This discussion will be followed by a presentation of several useful applications of the technique for the characterization of polymer surfaces and biological tissues specimens. Particular attention in these applications will focus on how the analytical problem impacts the performance requirements of the mass spectrometer and vice-versa.

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