In-situ etching of InP and InGaAlAs materials by using HCl gas in metalorganic vapor-phase epitaxy

2004 ◽  
Vol 272 (1-4) ◽  
pp. 125-130 ◽  
Author(s):  
T. Tsuchiya ◽  
T. Kitatani ◽  
K. Ouchi ◽  
H. Sato ◽  
M. Aoki
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Hcl Gas

In situDeep Etching for an InGaAlAs Buried Heterostructure by Using HCl Gas in a Metalorganic Vapor Phase Epitaxy Reactor

2004 ◽  
Vol 43 (No. 10A) ◽  
pp. L1247-L1249 ◽  
Author(s):  
Tomonobu Tsuchiya ◽  
Takeshi Kitatani ◽  
Kiyoshi Ouchi ◽  
Hiroshi Sato ◽  
Masahiko Aoki
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Buried Heterostructure ◽  
Hcl Gas

Continuous in situ X-ray reflectivity investigation on epitaxial growth of InGaN by metalorganic vapor phase epitaxy

2014 ◽  
Vol 407 ◽  
pp. 68-73 ◽  
Author(s):  
Guangxu Ju ◽  
Shingo Fuchi ◽  
Masao Tabuchi ◽  
Hiroshi Amano ◽  
Yoshikazu Takeda
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
X Ray

In situ optical monitoring of metalorganic vapor phase epitaxy growth of C-doped GaAs

1999 ◽  
Vol 68 (3) ◽  
pp. 349-352 ◽  
Author(s):  
A. Rebey ◽  
B. El Jani ◽  
A. Leycuras ◽  
S. Laugt ◽  
P. Gibart
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Optical Monitoring

Facet growth of AlxGa1-xAs with HCl gas by metalorganic vapor phase epitaxy

1994 ◽  
Vol 145 (1-4) ◽  
pp. 283-290 ◽  
Author(s):  
K. Shimoyama ◽  
N. Hosoi ◽  
K. Fujii ◽  
H. Gotoh
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Hcl Gas ◽  
Facet Growth

In situ reflectance monitoring of InP/InGaAsP films grown by metalorganic vapor phase epitaxy

1996 ◽  
Vol 69 (7) ◽  
pp. 928-930 ◽  
Author(s):  
R. M. Lum ◽  
M. L. McDonald ◽  
J. C. Bean ◽  
J. Vandenberg ◽  
T. L. Pernell ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy
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