Global analysis of heat transfer considering three-dimensional unsteady melt flow in CZ crystal growth of oxide

2007 ◽  
Vol 307 (1) ◽  
pp. 235-244 ◽  
Author(s):  
C.J. Jing ◽  
S. Ihara ◽  
K.-I. Sugioka ◽  
T. Tsukada ◽  
M. Kobayashi ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Crystal Growth ◽  
Global Analysis ◽  
Three Dimensional ◽  
Melt Flow

Application of Double Crucible in Cz Si Crystal Growth

2011 ◽  
Vol 178-179 ◽  
pp. 501-506
Author(s):  
A.I. Prostomolotov ◽  
N.A. Verezub
Keyword(s):  
Heat Transfer ◽  
Crystal Growth ◽  
Three Dimensional ◽  
Single Crystal Growth ◽  
Melt Flow ◽  
Phosphorus Doping ◽  
Phosphorus Diffusion ◽  
Double Crucible ◽  
Flow Heat ◽  
Phosphorus Losses

The numerical modeling of melt flow, heat transfer and impurity (phosphorus) diffusion in the double crucible of "Redmet-90M" Cz puller was carried out in an application to a 200 mm diameter Si single crystal growth. The double crucible consists of two coaxial crucibles having different sizes: 490 mm (external) and 300 mm (internal) inner diameters. The bottom of internal crucible has a central hole of Do = 6 and 12 mm diameter for melt inflow from the external crucible. During crystal pulling the granulated Si was added in the external crucible and a melt of the internal crucible was doped by phosphorus. Three-dimensional features of a rotating melt flow affecting on heat transfer and impurity diffusion in the internal crucible were analyzed. In particular, the melt precession and thermal asymmetry near the liquid-solid interface (LSI) in the internal crucible are discussed. It is shown that a significant phosphorus losses caused by its evaporation from a melt surface may be compensated by additional phosphorus doping in the internal crucible.

Three-Dimensional Simulation of Silicon Melt Flow in Electromagnetic Czochralski Crystal Growth

2000 ◽  
Vol 39 (Part 1, No. 2A) ◽  
pp. 372-377 ◽  
Author(s):  
Wei Wang ◽  
Masahito Watanabe ◽  
Taketoshi Hibiya ◽  
Takahiko Tanahashi
Keyword(s):  
Crystal Growth ◽  
Three Dimensional ◽  
Melt Flow ◽  
Czochralski Crystal Growth ◽  
Silicon Melt ◽  
Dimensional Simulation
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