Structure and reduction of large bumps formed on 4H-SiC epitaxial film originated from dislocations in substrate
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2016 ◽
Vol 34
(4)
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pp. 041509
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2011 ◽
Vol 2011
(09)
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pp. P09018
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Keyword(s):
2000 ◽
Vol 104
(14)
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pp. 3116-3120
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