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Oxygen-plasma treatment for low-temperature processing of lead–zirconate–titanate thin films
Materials Research Bulletin
◽
10.1016/j.materresbull.2005.09.010
◽
2006
◽
Vol 41
(3)
◽
pp. 536-540
◽
Cited By ~ 2
Author(s):
Eung Ryul Park
◽
Hyuk Kyoo Jang
◽
Eung Kil Kang
◽
Cheol Eui Lee
Keyword(s):
Thin Films
◽
Low Temperature
◽
Plasma Treatment
◽
Lead Zirconate Titanate
◽
Oxygen Plasma
◽
Lead Zirconate
◽
Oxygen Plasma Treatment
◽
Zirconate Titanate
◽
Low Temperature Processing
Download Full-text
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Cited By
References
Low-temperature processing of sol–gel-derived lead–zirconate–titanate thin films by oxygen-plasma treatment
Current Applied Physics
◽
10.1016/s1567-1739(02)00150-5
◽
2002
◽
Vol 2
(5)
◽
pp. 407-409
◽
Cited By ~ 4
Author(s):
Eung Kil Kang
◽
Hyuk Kyoo Jang
◽
Sung Kyun Lee
◽
Eung Ryul Park
◽
Cheol Eui Lee
◽
...
Keyword(s):
Thin Films
◽
Low Temperature
◽
Plasma Treatment
◽
Lead Zirconate Titanate
◽
Oxygen Plasma
◽
Sol Gel
◽
Lead Zirconate
◽
Oxygen Plasma Treatment
◽
Zirconate Titanate
◽
Low Temperature Processing
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Oxygen-Plasma Treatment of Sol-Gel Derived Lead Zirconate Titanate Thin Films
Ferroelectrics
◽
10.1080/713716066
◽
2002
◽
Vol 269
(1)
◽
pp. 123-128
◽
Cited By ~ 1
Author(s):
Cheol Eui Lee
◽
H. K. Jang
◽
E. R. Park
◽
E. K. Kang
◽
S. K. Lee
◽
...
Keyword(s):
Thin Films
◽
Plasma Treatment
◽
Lead Zirconate Titanate
◽
Oxygen Plasma
◽
Sol Gel
◽
Lead Zirconate
◽
Oxygen Plasma Treatment
◽
Zirconate Titanate
Download Full-text
Toward low-temperature processing of lead zirconate titanate thin films: Advances, strategies, and applications
Applied Physics Reviews
◽
10.1063/5.0054004
◽
2021
◽
Vol 8
(4)
◽
pp. 041315
Author(s):
Longfei Song
◽
Sebastjan Glinsek
◽
Emmanuel Defay
Keyword(s):
Thin Films
◽
Low Temperature
◽
Lead Zirconate Titanate
◽
Lead Zirconate
◽
Zirconate Titanate
◽
Low Temperature Processing
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Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application
10.1117/12.695608
◽
2006
◽
Cited By ~ 2
Author(s):
Z. J. Wang
◽
H. Kokawa
◽
H. Takizawa
◽
M. Ichiki
◽
R. Maeda
Keyword(s):
Thin Films
◽
Low Temperature
◽
Microwave Irradiation
◽
Lead Zirconate Titanate
◽
Lead Zirconate
◽
Zirconate Titanate
◽
Low Temperature Processing
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Low temperature formation of sol-gel derived ferroelectric lead zirconate titanate (Pb(ZrxTi1-x)O3, x = 0.3) thin films
Journal de Physique IV (Proceedings)
◽
10.1051/jp4:1998913
◽
1998
◽
Vol 08
(PR9)
◽
pp. Pr9-79-Pr9-82
◽
Cited By ~ 5
Author(s):
Q. Zhang
◽
R. W. Whatmore
◽
Z. Huang
◽
M. E. Vickers
Keyword(s):
Thin Films
◽
Low Temperature
◽
Lead Zirconate Titanate
◽
Sol Gel
◽
Lead Zirconate
◽
Zirconate Titanate
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Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films
Applied Physics Letters
◽
10.1063/1.125617
◽
2000
◽
Vol 76
(7)
◽
pp. 882-884
◽
Cited By ~ 19
Author(s):
H. K. Jang
◽
S. K. Lee
◽
Cheol Eui Lee
◽
S. J. Noh
◽
W. I. Lee
Keyword(s):
Thin Films
◽
Lead Zirconate Titanate
◽
Oxygen Plasma
◽
Sol Gel
◽
Lead Zirconate
◽
Zirconate Titanate
◽
Plasma Effects
Download Full-text
Low-temperature preparation of hydrothermal lead zirconate titanate thin films
Korean Journal of Chemical Engineering
◽
10.1007/bf02706860
◽
2000
◽
Vol 17
(4)
◽
pp. 455-460
◽
Cited By ~ 4
Author(s):
Kyung Won Seo
◽
Hyun Goo Kong
Keyword(s):
Thin Films
◽
Low Temperature
◽
Lead Zirconate Titanate
◽
Lead Zirconate
◽
Zirconate Titanate
◽
Low Temperature Preparation
◽
Temperature Preparation
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Low temperature crystallization of lead zirconate titanate thin films by a sol-gel method
Journal of Applied Physics
◽
10.1063/1.369362
◽
1999
◽
Vol 85
(10)
◽
pp. 7355-7361
◽
Cited By ~ 133
Author(s):
Z. Huang
◽
Q. Zhang
◽
R. W. Whatmore
Keyword(s):
Thin Films
◽
Low Temperature
◽
Lead Zirconate Titanate
◽
Sol Gel
◽
Lead Zirconate
◽
Gel Method
◽
Sol Gel Method
◽
Zirconate Titanate
◽
Low Temperature Crystallization
◽
Temperature Crystallization
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Characterization of lead zirconate titanate thin films deposited at low temperature by reactive facing target sputtering
Thin Solid Films
◽
10.1016/s0040-6090(00)01220-7
◽
2000
◽
Vol 375
(1-2)
◽
pp. 267-270
◽
Cited By ~ 6
Author(s):
Xin-Shan Li
◽
Tsunehisa Tanaka
◽
Yoshihiko Suzuki
Keyword(s):
Thin Films
◽
Low Temperature
◽
Lead Zirconate Titanate
◽
Lead Zirconate
◽
Zirconate Titanate
◽
Facing Target Sputtering
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Low-temperature growth of high-quality lead zirconate titanate thin films by 28 GHz microwave irradiation
Applied Physics Letters
◽
10.1063/1.1935748
◽
2005
◽
Vol 86
(21)
◽
pp. 212903
◽
Cited By ~ 49
Author(s):
Z. J. Wang
◽
H. Kokawa
◽
H. Takizawa
◽
M. Ichiki
◽
R. Maeda
Keyword(s):
Thin Films
◽
Low Temperature
◽
Microwave Irradiation
◽
Lead Zirconate Titanate
◽
Lead Zirconate
◽
High Quality
◽
Temperature Growth
◽
Low Temperature Growth
◽
Zirconate Titanate
Download Full-text
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