Structural and electrical properties of K 3 Li 2 Nb 5 O 15 thin film grown by pulsed laser deposition

2017 ◽  
Vol 94 ◽  
pp. 287-290 ◽  
Author(s):  
B. Allouche ◽  
Y. Gagou ◽  
A. Belboukhari ◽  
F. Le Marrec ◽  
M. El Marssi
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Structural And Electrical Properties ◽  
O 15

Single- and Multi-target Pulsed Laser Deposition of Thin BSTO films: Preparation, Microstructure and Electrical Properties

2003 ◽  
Vol 784 ◽  
Author(s):  
Kumaravinothan Sarma ◽  
Peter Kr. Petrov ◽  
Neil McN. Alford
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Film Surface ◽  
Laser Deposition ◽  
X Ray Diffraction ◽  
X Ray ◽  
Structural And Electrical Properties ◽  
Capacitor Structure

ABSTRACTA comparative study of microstructure and electrical properties of BaxSr1-xTiO3 films made by single- and multi-target pulsed laser deposition was carried out. The films were epitaxially grown on both LaAlO3 and MgO substrates. The structural properties of all samples were investigated using X-ray diffraction and Raman spectroscopy. The elemental composition of the samples was investigated using energy dispersive X-ray analysis. For electrical properties examination, a simple capacitor structure was patterned on the film surface. Thin films made using both methods exhibit similar structural and electrical properties; however the samples made by a multi-target method underwent phase transition in a broader temperature region. The results prove the possibility of using the multi-target pulse laser deposition as a more flexible method for engineering thin film stoichometry.

Pulsed Laser Deposition and Analysis for Structural and Electrical Properties of HfO2–TiO2Composite Films

2004 ◽  
Vol 43 (4A) ◽  
pp. 1571-1576 ◽  
Author(s):  
Kazutaka Honda ◽  
Akira Sakai ◽  
Mitsuo Sakashita ◽  
Hiroya Ikeda ◽  
Shigeaki Zaima ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Structural And Electrical Properties
Sign in / Sign up

Export Citation Format

Share Document