scholarly journals Measurement and analysis of the radial motion error of aerostatic ultra-precision spindle

Measurement ◽  
2019 ◽  
Vol 137 ◽  
pp. 624-635 ◽  
Author(s):  
Hailong Cui ◽  
Dajiang Lei ◽  
Xinjiang Zhang ◽  
He Lan ◽  
Zhengyi Jiang ◽  
...  
Keyword(s):  
Radial Motion ◽  
Motion Error ◽  
Measurement And Analysis ◽  
Ultra Precision

THE EVALUATION OF SURFACE MORPHOLOGY USING FLEXURE GUIDED NANO-POSITIONING SYSTEM AND ULTRA-PRECISION LATHE

2012 ◽  
Vol 06 ◽  
pp. 172-177
Author(s):  
Nam-Su Kwak ◽  
Jae-Yeol Kim
Keyword(s):  
Surface Morphology ◽  
Piezoelectric Actuator ◽  
Control Method ◽  
Positioning System ◽  
Motion Error ◽  
Precision Stage ◽  
Cnc Lathe ◽  
Single Crystal Diamond ◽  
Ultra Precision ◽  
And Control

In this study, piezoelectric actuator, Flexure guide, Power transmission element and control method and considered for Nano-positioning system apparatus. The main objectives of this thesis were to develop the 3-axis Ultra-precision stages which enable the 3-axis control by the manipulation of the piezoelectric actuator and to enhance the precision of the Ultra-Precision CNC lathe which is responsible for the ductile mode machining of the hardened-brittle material where the machining is based on the single crystal diamond. Ultra-precision CNC lathe is used for machining and motion error of the machine are compensated by using 3-axis Ultra-precision stage. Through the simulation and experiments on ultra-precision positioning, stability and priority on Nano-positioning system with 3-axis ultra-precision stage and control algorithm are secured by using NI Labview. And after applying the system, is to analyze the surface morphology of the mold steel (SKD61)

On-Machine Metrology System Using Confocal Chromatic Probe and Motion Error Correction for Ultra-Precision Machine Tool

2020 ◽  
Author(s):  
Hao Duan ◽  
Shinya Morita ◽  
Takuya Hosobata ◽  
Masahiro Takeda ◽  
Yutaka Yamagata
Keyword(s):  
Machine Tool ◽  
Free Form ◽  
Reference Curve ◽  
Optical Surface ◽  
Motion Error ◽  
Precision Machine ◽  
Ultra Precision ◽  
Axis Position ◽  
Form Deviation ◽  
Accuracy And Repeatability

Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations. This waviness lowers the quality of the optical surface. To address this problem, we use the waviness of the axial displacement of the ultra-precision machine tool. The waviness is obtained by a non-contact on-machine metrology (OMM) system that measures an optical flat as a correction reference curve, which is used to correct the surface of the workpiece to reduce the effect of waviness in advance. The OMM system consists of a displacement probe and a machine tool axis position capture device. The probe system uses a confocal chromatic probe on an ultra-precision machine tool to evaluate the form deviation of the workpiece with 1 nm resolution. The axis position capture system uses a signal branch circuit of linear scale on each axis from the ultra-precision machine tool. The OMM system is tested in terms of accuracy and repeatability. In comparison to the results of the shaper cutting of an oxygen-free copper (OFC) workpiece with feed-forward correction, we were able to reduce the profile error from 125.3 nm to 42.1 nm in p-v (peak to valley) and eventually also reduced the waviness.

scholarly journals Error Analysis of Radial Motion Measurement of Ultra-Precision Spindle

2018 ◽  
Vol 06 (03) ◽  
pp. 567-574
Author(s):  
Risheng Zhang ◽  
Jialin Yang ◽  
Erwei Shang ◽  
Yanqiu Chen ◽  
Yu Liu
Keyword(s):  
Error Analysis ◽  
Radial Motion ◽  
Motion Measurement ◽  
Ultra Precision

COMPENSATION OF ENVIRONMENT AND MOTION ERROR FOR ACCURACY IMPROVEMENT OF ULTRA-PRECISION LATHE

2006 ◽  
Vol 20 (25n27) ◽  
pp. 3763-3768 ◽  
Author(s):  
LEE-KU KWAC ◽  
JAE-YEOL KIM ◽  
HONG-GUN KIM
Keyword(s):  
Real Time ◽  
Precision Machining ◽  
Accuracy Improvement ◽  
Motion Error ◽  
Electric Actuator ◽  
Machining Precision ◽  
Ultra Precision ◽  
Time Correction ◽  
Thermal Deviation ◽  
Machine Structure

The technological manipulation of the piezo-electric actuator could compensate for the errors of the machining precision during the process of machining which lead to an elevation and enhancement in overall precisions. This manipulation is a very convenient method to advance the precision for nations without the solid knowledge of the ultra-precision machining technology. There were 2 divisions of researches conducted to develop the UPCU for precision enhancement of the current lathe and compensation for the environmental errors as shown below; The first research was designed to measure and real-time correct any deviations in variety of areas to achieve a compensation system through more effective optical fiber laser encoder than the encoder resolution which was currently used in the existing lathe. The deviations for a real-time correction were composed of followings; the surrounding air temperature, the thermal deviations of the machining materials, the thermal deviations in spindles, and the overall thermal deviation occurred due to the machine structure. The second research was to develop the UPCU and to improve the machining precision through the ultra-precision positioning and the real-time operative error compensation. The ultimate goal was to improve the machining precision of the existing lathe through completing the 2 research tasks mentioned above.

Spindle radial motion error measurement using a circular grating and a autocollimator

2019 ◽  
Vol 27 (9) ◽  
pp. 2053-2061
Author(s):  
娄志峰 LOU Zhi-feng ◽  
郝秀朋 HAO Xiu-peng ◽  
刘 力 LIU Li ◽  
王晓东 WANG Xiao-dong
Keyword(s):  
Radial Motion ◽  
Error Measurement ◽  
Motion Error ◽  
Circular Grating

Motion and Environment Error Compensation for Ultra-Precision Lathe

2005 ◽  
Vol 297-300 ◽  
pp. 2339-2344
Author(s):  
Lee Ku Kwac ◽  
Jae Yeol Kim ◽  
Young Tae Cho
Keyword(s):  
Real Time ◽  
Error Compensation ◽  
Response Speed ◽  
Inertial Mass ◽  
Diamond Turning ◽  
Displacement Sensor ◽  
Motion Error ◽  
Flat Surfaces ◽  
Time Motion ◽  
Ultra Precision

Recently, the demand for Ultra-precision products is rapidly increasing, especially in such industries as semi-conductors, computers, aerospace, and precision machinary. Ultra-precision processing is also extremely needed for NT in the field of mechanical engineering. Lately, together with drastic advancement of electronic and photonics industry, the need of Ultra-precision processing is increased in the manufacturing of various kernel parts, which are connected with these industrial fields. Especially, motion accuracy to nanometers is required in order in stroke of hundreds millimeters according as the diameter of the processed object great and the processing accuracy rises. In this case, the response speed absolute delay due to inertial mass of the moving parts is very large. Therefore, real-time motion error compensation becomes the barest necessity. In this paper, we used ultra-precision cutting unit (UPCU) to cope with the problem. A special UPCU was designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error was compensated in real time using the UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

Research on the Online Test of the Fly Cutting Machine Tool Spindle

2013 ◽  
Vol 579-580 ◽  
pp. 177-180
Author(s):  
Peng Qiang Fu ◽  
Yong Zhang ◽  
Fei Hu Zhang ◽  
Jing He Wang
Keyword(s):  
Machine Tool ◽  
Test System ◽  
Motion Error ◽  
Radial Error ◽  
Synchronous Motion ◽  
Online Test ◽  
Cutting Machine ◽  
Fly Cutting ◽  
Ultra Precision ◽  
Error Motion

The online test system of the vertical spindle motion error of the ultra-precision fly cutting machine tool was established. And then using the online test system established to test and analyze the state of the rotary motion of the spindle under the idling condition. The axial synchronous motion error value of the spindle under 390rpm is about 61 nm, and the asynchronous error motion is about 33nm. The radial error motion value is about 91nm, and the asynchronous error is about 35nm. Through the test, we found that the axial and radial spindle error motion accuracy under idling speed can been improved with the spindle speed increases.

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