Measurement of five-degrees-of-freedom spindle error motion using multi probe error separation

Herein, a precision measurement method is proposed to evaluate the radial, axial, and tilt error motions of rotating devices such as precision spindles. To improve the accuracy of the estimated multiple-degree-of-freedom error motion components, form error signals in the runout signals are separated and precompensated for before the calculation of the five-degrees-of-freedom error motion components. Fourier model-based multi probe error separation (MPES) techniques, which can prevent the occurrence of harmonic distortions, are applied to separate the form error signals. A three-probe method is applied to layers on the side surface of the cylindrical artifact, and a modified two-probe method is developed and applied to the upper surface. The radial, tilt, and axial error motions are calculated using the runout signals that do not contain the separated form error signals. The measurement system uses eight capacitive probes to detect the runout signals of the cylindrical artifact mounted at the center of the rotating device. To compare the proposed method with the five-probe-based conventional measuring method, an evaluation test simulation is conducted repeatedly five times. Results indicate that the proposed MPES method calculated the uncertainty using the deviation between the computed results from the existing and novel methods; additionally, the input signal in terms of the radial, tilt (layers 1 and 2), and axial error motions are [Formula: see text], [Formula: see text], [Formula: see text], and [Formula: see text], respectively. It is confirmed that the undesirable effects of the form error signals are successfully removed and that the accuracies of the measured spindle error motion components improve.

Characterization and Evaluation of Rotation Accuracy of Hydrostatic Spindle under the Influence of Unbalance

The paper studies the characterization and evaluation technology of rotation accuracy of hydrostatic spindle under the influence of unbalance. The dynamic model of the motion error of the hydrostatic spindle is established based on the dynamic parameters. The variation law of motion error of spindle rotor is analyzed under the unbalanced mass. The paper finds that with the increase of the spindle speed, the amplitude of the spindle error motion will increase, and the inclination angle θ error is more sensitive to the change in the rotational speed. In the total synthesis accuracy, the proportion of synchronization error decreases with the increase of the rotational speed. Finally, the least squares evaluation algorithm is used to evaluate the rotation error of the hydrostatic spindle, and a method for evaluating the rotation accuracy of the hydrostatic spindle with high calculation accuracy and calculation efficiency is proposed.

Cosine Error Elimination Method for One-Dimensional Convex and Concave Surface Profile Measurements

This paper presents a novel method to eliminate cosine error in precision concave and convex surface measurement by integrating a displacement probe in a precision spindle. Cosine error in surface profile measurement comes from an angular misalignment between the measurement axis and the axis of motion and negatively affects the measurement accuracy, especially in optical surface measurements. A corrective multiplier can solve this problem for spherical surface measurement, but cosine error cannot be eliminated in the case of complex optical surface measurement because current tools do not measure such surfaces along the direction normal to the measurement plane. Because the displacement probe is placed on the spindle axis, the spindle error motion will affect the shape precision and surface roughness measurement of optical components such as mirrors and lenses, and the displacement probe will measure a combination of the spindle error motion and the geometry of optical surfaces. Here, the one-dimensional concave, convex, and hollow measurement targets were used, and cosine error was fundamentally eliminated by aligning the probe on the spindle always normal to the measured surface, and compensation was made for the aerostatic bearing spindle rotational error obtained by the reversal method. The results show that this proposed measurement method cannot only eliminate cosine error but also scan the large area quickly and conveniently. In addition, measurement uncertainty and further consideration for future work were discussed.