Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

2010 ◽  
Vol 87 (9) ◽  
pp. 1805-1807 ◽  
Author(s):  
Zilan Li ◽  
Tom Schram ◽  
Thomas Witters ◽  
Joshua Tseng ◽  
Stefan De Gendt ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Oxygen Incorporation ◽  
Integration Approach ◽  
Work Function Tuning ◽  
Gate Work Function

Metal gate work function tuning by Al incorporation in TiN

2014 ◽  
Vol 115 (7) ◽  
pp. 074504 ◽  
Author(s):  
L. P. B. Lima ◽  
H. F. W. Dekkers ◽  
J. G. Lisoni ◽  
J. A. Diniz ◽  
S. Van Elshocht ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Work Function Tuning ◽  
Gate Work Function

scholarly journals Performance Evaluation of FD-SOI MOSFETS for Different Metal Gate Work Function

2011 ◽  
Vol 2 (1) ◽  
pp. 11-24 ◽  
Author(s):  
Deepesh Ranka ◽  
Ashwani K. Rana ◽  
Rakesh Kumar Yadav ◽  
Kamalesh Yadav ◽  
Devendra Giri
Keyword(s):  
Performance Evaluation ◽  
Work Function ◽  
Metal Gate ◽  
Gate Work Function

Bottom-up method for work function tuning in high-k/metal gate stacks in advanced CMOS technologies

2011 ◽  
Author(s):  
Mrunal A. Khaderbad ◽  
Rohit Pandharipande ◽  
Aradhana Gautam ◽  
Abhishek Mishra ◽  
Meenakshi Bhaisare ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Metal Gate ◽  
Bottom Up ◽  
High K ◽  
Work Function Tuning

Metal gate work function extraction using Fowler-Nordheim tunneling techniques

2005 ◽  
Vol 80 ◽  
pp. 280-283 ◽  
Author(s):  
G. Sjöblom ◽  
L. Pantisano ◽  
T. Schram ◽  
J. Olsson ◽  
V. Afanas’ev ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Nordheim Tunneling ◽  
Gate Work Function
Sign in / Sign up

Export Citation Format

Share Document