Fabrication of Micromachined Mold Masters for 3-D, High-Aspect-Ratio Cell Culturing Scaffolds
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In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.
2014 ◽
Vol 113
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pp. 35-39
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2018 ◽
Vol 27
(4)
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pp. 686-697
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2017 ◽
Vol 9
(12)
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pp. 168781401773815
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Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion Etching
2006 ◽
Vol 15
(1)
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pp. 84-93
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2005 ◽
Vol 36
(7)
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pp. 673-677
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