Failure analysis of vertical cavity surface emission laser diodes

2004 ◽  
Vol 44 (9-11) ◽  
pp. 1593-1597
Author(s):  
F. Siegelin ◽  
C. Brillert

Abstract A failure analysis case study for oxide confined vertical cavity surface emitting laser (VCSEL) arrays will be presented. The focus of this work is on devices failing with a reduced optical output due to a rapid degradation of the laser diode. The complete analysis flow will be shown, including electrical and optical characterization as well as detailed investigations on a nanometer scale. It is known that these fails are caused by dislocations. An advanced FIB preparation method enabled cross-section and plan view TEM to successfully visualize the complete extent of a dislocation network.


1990 ◽  
Vol 2 (7) ◽  
pp. 456-458 ◽  
Author(s):  
Y.H. Wang ◽  
K. Tai ◽  
J.D. Wynn ◽  
M. Hong ◽  
R.J. Fischer ◽  
...  

2014 ◽  
Vol 39 (19) ◽  
pp. 5582
Author(s):  
Yonan Su ◽  
Chun-Yan Lin ◽  
Ray-Ching Hong ◽  
Wen-Xing Yang ◽  
Chien-Chung Jeng ◽  
...  

1989 ◽  
Vol 25 (24) ◽  
pp. 1644 ◽  
Author(s):  
K. Tai ◽  
R.J. Fischer ◽  
K.W. Wang ◽  
S.N.G. Chu ◽  
A.Y. Cho

1993 ◽  
Vol 40 (11) ◽  
pp. 2115-2116
Author(s):  
J.A. Lott ◽  
R.P. Schneider ◽  
K.J. Molly

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