Failure Analysis of Vertical Cavity Surface Emission Laser Diodes
Keyword(s):
Abstract A failure analysis case study for oxide confined vertical cavity surface emitting laser (VCSEL) arrays will be presented. The focus of this work is on devices failing with a reduced optical output due to a rapid degradation of the laser diode. The complete analysis flow will be shown, including electrical and optical characterization as well as detailed investigations on a nanometer scale. It is known that these fails are caused by dislocations. An advanced FIB preparation method enabled cross-section and plan view TEM to successfully visualize the complete extent of a dislocation network.
2004 ◽
Vol 44
(9-11)
◽
pp. 1593-1597
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2008 ◽
Vol 10
(4)
◽
pp. 044016
◽
Keyword(s):
Keyword(s):