The effect of electrode material on the electrical conduction of metal-Pb(Zr0.53Ti0.47)O3-metal thin film capacitors

2005 ◽  
Vol 45 (5-6) ◽  
pp. 1003-1006 ◽  
Author(s):  
P.C. Juan ◽  
H.C. Chou ◽  
J.Y.M. Lee
Keyword(s):  
Thin Film ◽  
Electrical Conduction ◽  
Electrode Material ◽  
Metal Thin Film ◽  
Thin Film Capacitors

A model for electrical conduction in metal‐ferroelectric‐metal thin‐film capacitors

1994 ◽  
Vol 75 (2) ◽  
pp. 1014-1022 ◽  
Author(s):  
C. Sudhama ◽  
A. C. Campbell ◽  
P. D. Maniar ◽  
R. E. Jones ◽  
R. Moazzami ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Conduction ◽  
Metal Thin Film ◽  
Thin Film Capacitors

Contribution of electrodes and microstructures to the electrical properties of Pb(Zr0.53Ti0.47)O3 thin film capacitors

1994 ◽  
Vol 9 (11) ◽  
pp. 2968-2975 ◽  
Author(s):  
H.N. Al-Shareef ◽  
A.I. Kingon ◽  
X. Chen ◽  
K.R. Bellur ◽  
O. Auciello
Keyword(s):  
Thin Film ◽  
Electrode Material ◽  
Bottom Electrode ◽  
Low Voltage ◽  
Order Effect ◽  
Major Effect ◽  
Leakage Currents ◽  
Ohmic Behavior ◽  
Thin Film Capacitors ◽  
Pzt Thin Film

Pb(Zr0.53Ti0.47)O3 (PZT) thin film capacitors have been fabricated with four electrode combinations: Pt/PZT/Pt/SiO2Si, RuO2/PZT/Pt/SiO2/Si, RuO2/PZT/RuO2/SiO2/Si, and Pt/PZT/RuO2/SiO2/Si. It is shown that polarization fatigue is determined largely by the electrode type (Pt vs RuO2), and microstructure has only a second-order effect on fatigue. If either the top or bottom electrode is platinum, significant polarization fatigue occurs. Fatigue-free capacitors are obtained only when both electrodes are RuO2. In contrast, the bottom electrode is found to have a major effect on the leakage characteristics of the PZT capacitors, presumably via microstructural modifications. Capacitors with bottom RuO2 electrodes show high leakage currents (J = 10−3-10−5 A/cm2 at 1 V) irrespective of the top electrode material. Capacitors with Pt bottom electrodes have much lower leakage currents (J = 10−8 A/cm2 at 1 V) irrespective of the top electrode material. At low voltage, the I-V curves show ohmic behavior and negligible polarity dependence for all capacitor types. At higher voltages, the leakage current is probably Schottky emission controlled for the capacitors with Pt bottom electrodes.

Microwave losses in metal-ferroelectric-metal thin-film capacitors

2008 ◽  
Vol 34 (7) ◽  
pp. 565-567 ◽  
Author(s):  
M. M. Gaĭdukov ◽  
A. G. Gagarin ◽  
A. B. Kozyrev ◽  
S. V. Razumov ◽  
A. V. Tumarkin ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Thin Film ◽  
Thin Film Capacitors ◽  
Microwave Losses

Asymmetric properties of Pb(Zr,Ti)O3 thin film capacitors with conducting oxides

1998 ◽  
Vol 08 (PR9) ◽  
pp. Pr9-109-Pr9-112 ◽  
Author(s):  
C. H. Choi ◽  
J. Lee
Keyword(s):  
Thin Film ◽  
Conducting Oxides ◽  
Thin Film Capacitors

Electrical Conduction in Thin Film Carbons.

1987 ◽  
Author(s):  
K. Sugihara ◽  
M. S. Dresselhaus
Keyword(s):  
Thin Film ◽  
Electrical Conduction
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