A Monté Carlo simulation study of high-dose and low-energy boron implantation into LPCVD-NiDoS polycrystalline thin films
2008 ◽
Vol 11
(3)
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pp. 71-80
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2003 ◽
Vol 125
(9)
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pp. 485-491
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Keyword(s):
2019 ◽
Vol 1248
◽
pp. 012048
Keyword(s):
2008 ◽
Vol 32
(2)
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pp. 63-68