Low‐energy ion beam effects on the molecular beam epitaxical growth of III‐V compound semiconductors: A Monte Carlo simulation study
Keyword(s):
Ion Beam
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Keyword(s):
2011 ◽
Vol 58
(1)
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pp. 87-94
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2008 ◽
Vol 11
(3)
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pp. 71-80
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Keyword(s):
2008 ◽
Vol 32
(2)
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pp. 63-68