N-type silicon nanowires prepared by silver metal-assisted chemical etching: Fabrication and optical properties

2019 ◽  
Vol 90 ◽  
pp. 198-204 ◽  
Author(s):  
Le Thanh Cong ◽  
Nguyen Thi Ngoc Lam ◽  
Nguyen Truong Giang ◽  
Pham The Kien ◽  
Nguyen Duc Dung ◽  
...  
Keyword(s):  
Optical Properties ◽  
Silicon Nanowires ◽  
Chemical Etching ◽  
Type Silicon ◽  
Metal Assisted Chemical Etching ◽  
Silver Metal

Growth, Structure and Optical Properties of Silicon Nanowires Formed by Metal-Assisted Chemical Etching

2012 ◽  
Vol 7 (6) ◽  
pp. 602-606 ◽  
Author(s):  
K. A. Gonchar ◽  
L. A. Osminkina ◽  
R. A. Galkin ◽  
M. B. Gongalsky ◽  
V. S. Marshov ◽  
...  
Keyword(s):  
Optical Properties ◽  
Silicon Nanowires ◽  
Chemical Etching ◽  
Growth Structure ◽  
Metal Assisted Chemical Etching

scholarly journals Replacing Metals with Oxides in Metal-Assisted Chemical Etching Enables Direct Fabrication of Silicon Nanowires by Solution Processing

Nano Letters ◽  
2021 ◽  
Vol 21 (5) ◽  
pp. 2310-2317
Author(s):  
Maxime Gayrard ◽  
Justine Voronkoff ◽  
Cédric Boissière ◽  
David Montero ◽  
Laurence Rozes ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Chemical Etching ◽  
Solution Processing ◽  
Direct Fabrication ◽  
Metal Assisted Chemical Etching

scholarly journals Passivation of high aspect ratio silicon nanowires by using catalytic chemical vapor deposition for radial heterojunction solar cell application

RSC Advances ◽  
2017 ◽  
Vol 7 (71) ◽  
pp. 45101-45106 ◽  
Author(s):  
Gangqiang Dong ◽  
Yurong Zhou ◽  
Hailong Zhang ◽  
Fengzhen Liu ◽  
Guangyi Li ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Aspect Ratio ◽  
Silicon Nanowires ◽  
Vapor Deposition ◽  
High Aspect Ratio ◽  
Chemical Etching ◽  
Chemical Vapor ◽  
Solar Cell Application ◽  
Catalytic Chemical Vapor Deposition ◽  
Metal Assisted Chemical Etching

High aspect ratio silicon nanowires (SiNWs) prepared by metal-assisted chemical etching were passivated by using catalytic chemical vapor deposition (Cat-CVD).

Light-emitting silicon nanowires obtained by metal-assisted chemical etching

2017 ◽  
Vol 32 (4) ◽  
pp. 043004 ◽  
Author(s):  
Alessia Irrera ◽  
Maria Josè Lo Faro ◽  
Cristiano D’Andrea ◽  
Antonio Alessio Leonardi ◽  
Pietro Artoni ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Chemical Etching ◽  
Light Emitting ◽  
Metal Assisted Chemical Etching

Wafer-Scale, Highly-Ordered Silicon Nanowires Produced by Step-and-Flash Imprint Lithography and Metal-Assisted Chemical Etching

2012 ◽  
Vol 1512 ◽  
Author(s):  
Jian-Wei Ho ◽  
Qixun Wee ◽  
Jarrett Dumond ◽  
Li Zhang ◽  
Keyan Zang ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Cross Sections ◽  
Silicon Nanowires ◽  
High Aspect Ratio ◽  
Chemical Etching ◽  
Semiconductor Device ◽  
Imprint Lithography ◽  
Wafer Level ◽  
Conventional Photolithography ◽  
Metal Assisted Chemical Etching

ABSTRACTA combinatory approach of Step-and-Flash Imprint Lithography (SFIL) and Metal-Assisted Chemical Etching (MacEtch) was used to generate near perfectly-ordered, high aspect ratio silicon nanowires (SiNWs) on 4" silicon wafers. The ordering and shapes of SiNWs depends only on the SFIL nanoimprinting mould used, thereby enabling arbitary SiNW patterns not possible with nanosphere and interference lithography (IL) to be generated. Very densely packed SiNWs with periodicity finer than that permitted by conventional photolithography can be produced. The height of SiNWs is, in turn, controlled by the etching duration. However, it was found that very high aspect ratio SiNWs tend to be bent during processing. Hexagonal arrays of SiNW with circular and hexagonal cross-sections of dimensions 200nm and less were produced using pillar and pore patterned SFIL moulds. In summary, this approach allows highlyordered SiNWs to be fabricated on a wafer-level basis suitable for semiconductor device manufacturing.

Decisive role of dopants in the optical properties of vertically aligned silicon nanowires prepared by metal-assist chemical etching

2021 ◽  
Vol 121 ◽  
pp. 111632
Author(s):  
Le Thanh Cong ◽  
Nguyen Thi Ngoc Lam ◽  
Doan Van Thuong ◽  
Ngo Ngoc Ha ◽  
Nguyen Duc Dung ◽  
...  
Keyword(s):  
Optical Properties ◽  
Silicon Nanowires ◽  
Chemical Etching ◽  
Decisive Role ◽  
Vertically Aligned
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