Synthesis and photoluminescence study of silicon nanowires obtained by metal assisted chemical etching

Author(s):  
E. Fakhri ◽  
M. T. Sultan ◽  
A. Manolescu ◽  
S. Ingvarsson ◽  
N. Plugaru ◽  
...  
Nano Letters ◽  
2021 ◽  
Vol 21 (5) ◽  
pp. 2310-2317
Author(s):  
Maxime Gayrard ◽  
Justine Voronkoff ◽  
Cédric Boissière ◽  
David Montero ◽  
Laurence Rozes ◽  
...  

RSC Advances ◽  
2017 ◽  
Vol 7 (71) ◽  
pp. 45101-45106 ◽  
Author(s):  
Gangqiang Dong ◽  
Yurong Zhou ◽  
Hailong Zhang ◽  
Fengzhen Liu ◽  
Guangyi Li ◽  
...  

High aspect ratio silicon nanowires (SiNWs) prepared by metal-assisted chemical etching were passivated by using catalytic chemical vapor deposition (Cat-CVD).


2017 ◽  
Vol 32 (4) ◽  
pp. 043004 ◽  
Author(s):  
Alessia Irrera ◽  
Maria Josè Lo Faro ◽  
Cristiano D’Andrea ◽  
Antonio Alessio Leonardi ◽  
Pietro Artoni ◽  
...  

2012 ◽  
Vol 1512 ◽  
Author(s):  
Jian-Wei Ho ◽  
Qixun Wee ◽  
Jarrett Dumond ◽  
Li Zhang ◽  
Keyan Zang ◽  
...  

ABSTRACTA combinatory approach of Step-and-Flash Imprint Lithography (SFIL) and Metal-Assisted Chemical Etching (MacEtch) was used to generate near perfectly-ordered, high aspect ratio silicon nanowires (SiNWs) on 4" silicon wafers. The ordering and shapes of SiNWs depends only on the SFIL nanoimprinting mould used, thereby enabling arbitary SiNW patterns not possible with nanosphere and interference lithography (IL) to be generated. Very densely packed SiNWs with periodicity finer than that permitted by conventional photolithography can be produced. The height of SiNWs is, in turn, controlled by the etching duration. However, it was found that very high aspect ratio SiNWs tend to be bent during processing. Hexagonal arrays of SiNW with circular and hexagonal cross-sections of dimensions 200nm and less were produced using pillar and pore patterned SFIL moulds. In summary, this approach allows highlyordered SiNWs to be fabricated on a wafer-level basis suitable for semiconductor device manufacturing.


NANO ◽  
2020 ◽  
Vol 15 (06) ◽  
pp. 2050076
Author(s):  
Fang Sun ◽  
Zhiyuan Tan ◽  
Zhengguang Hu ◽  
Jun Chen ◽  
Jie Luo ◽  
...  

Silicon is widely studied as a high-capacity lithium-ion battery anode. However, the pulverization of silicon caused by a large volume expansion during lithiation impedes it from being used as a next generation anode for lithium-ion batteries. To overcome this drawback, we synthesized ultrathin silicon nanowires. These nanowires are 1D silicon nanostructures fabricated by a new bi-metal-assisted chemical etching process. We compared the lithium-ion battery properties of silicon nanowires with different average diameters of 100[Formula: see text]nm, 30[Formula: see text]nm and 10[Formula: see text]nm and found that the 30[Formula: see text]nm ultrathin silicon nanowire anode has the most stable properties for use in lithium-ion batteries. The above anode demonstrates a discharge capacity of 1066.0[Formula: see text]mAh/g at a current density of 300[Formula: see text]mA/g when based on the mass of active materials; furthermore, the ultrathin silicon nanowire with average diameter of 30[Formula: see text]nm anode retains 87.5% of its capacity after the 50th cycle, which is the best among the three silicon nanowire anodes. The 30[Formula: see text]nm ultrathin silicon nanowire anode has a more proper average diameter and more efficient content of SiOx. The above prevents the 30[Formula: see text]nm ultrathin silicon nanowires from pulverization and broken during cycling, and helps the 30[Formula: see text]nm ultrathin silicon nanowires anode to have a stable SEI layer, which contributes to its high stability.


Author(s):  
Fenfen Wang ◽  
Xianfeng Gao ◽  
Lulu Ma ◽  
Chris Yuan

Abstract Silicon nanowires (SiNWs) with three different average diameters of 90, 120, and 140 nm were synthesized by a metal-assisted chemical etching (MACE) method. Environmental sustainability of the MACE process was studied by investigating material consumptions, gas emissions, and silver nanoparticle concentrations in nitric acid solutions for 1 g of SiNWs and 1 kW h of lithium-ion battery (LIB) electrodes. It was found that the process for 90 nm SiNWs has the best sustainability performance compared with the other two processes. Specifically, in this study for 1 g of 90 nm SiNWs, 8.845 g of Si wafer is consumed, 1.09 g of H2 and 1.04 g of NO are produced, and 54.807 mg of Ag nanoparticles are found in the HNO3 solution. Additionally, for 1 kW h of LIB electrodes, the process for 90 nm SiNWs results in 1.943 kg of Si wafer consumption, 239.455 g of H2 and 239.455 g of NO emissions, and 12.040 g of Ag nanoparticles concentrations. By quantitatively investigating the material consumptions and emissions, this study assesses the sustainability performance of the MACE process for synthesizing SiNWs for use in LIBs, and thus it provides process data for the analysis and the development of sustainable production methods for SiNWs and similar anode materials for next-generation LIBs.


2013 ◽  
Vol 5 (10) ◽  
pp. 4302-4308 ◽  
Author(s):  
Nadine Geyer ◽  
Bodo Fuhrmann ◽  
Hartmut S. Leipner ◽  
Peter Werner

RSC Advances ◽  
2016 ◽  
Vol 6 (96) ◽  
pp. 93649-93659 ◽  
Author(s):  
S. A. Kara ◽  
A. Keffous ◽  
A. M. Giovannozzi ◽  
A. M. Rossi ◽  
E. Cara ◽  
...  

Flexible silicon nanowires fabricated by nano spheres lithography and metal assisted chemical etching for surface enhanced Raman spectroscopy.


2014 ◽  
Vol 16 (48) ◽  
pp. 26711-26714 ◽  
Author(s):  
Chia-Yun Chen ◽  
Yu-Rui Liu

We explored the kinetics of ordered silicon nanowires with the formation of nanogaps prepared using metal-assisted chemical etching.


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