Determination of the area density and composition of alloy film using dual alpha particle energy loss

2017 ◽  
Vol 392 ◽  
pp. 102-105
Author(s):  
Xiaojun Ma ◽  
Bo Li ◽  
Dangzhong Gao ◽  
Jiayun Xu ◽  
Yongjian Tang
Keyword(s):  
Energy Loss ◽  
Alpha Particle ◽  
Alloy Film ◽  
Particle Energy ◽  
Area Density ◽  
Alpha Particle Energy ◽  
Particle Energy Loss

Diffusion studies of Ra and Pb in GaAs by the alpha-particle energy loss method

1998 ◽  
Vol 84 (11) ◽  
pp. 6003-6006 ◽  
Author(s):  
M. Adamcyk ◽  
M. Beaudoin ◽  
I. Kelson ◽  
Y. Levy ◽  
T. Tiedje
Keyword(s):  
Energy Loss ◽  
Alpha Particle ◽  
Particle Energy ◽  
Diffusion Studies ◽  
Alpha Particle Energy ◽  
Loss Method ◽  
Particle Energy Loss

Determining the profile of textured membranes by the alpha particle energy loss method

2002 ◽  
Vol 80 (14) ◽  
pp. 2607-2609 ◽  
Author(s):  
C. Kaiser ◽  
Y. Levy ◽  
T. Tiedje ◽  
Jeff F. Young ◽  
I. Kelson
Keyword(s):  
Energy Loss ◽  
Alpha Particle ◽  
Particle Energy ◽  
Alpha Particle Energy ◽  
Loss Method ◽  
Particle Energy Loss

In situ real time monitoring of thickness and composition in MBE using alpha particle energy loss

1999 ◽  
Vol 201-202 ◽  
pp. 26-30 ◽  
Author(s):  
M. Beaudoin ◽  
M. Adamcyk ◽  
Y. Levy ◽  
J.A. MacKenzie ◽  
S. Ritchie ◽  
...  
Keyword(s):  
Energy Loss ◽  
Real Time ◽  
Alpha Particle ◽  
Particle Energy ◽  
Real Time Monitoring ◽  
Alpha Particle Energy ◽  
Particle Energy Loss
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