Mapping of non-planar surfaces and film conformality by alpha-particle energy loss spectroscopy

Author(s):  
I Kelson ◽  
C.V Kaiser ◽  
Y Levy ◽  
G Biasiol ◽  
E Kapon
1998 ◽  
Vol 84 (11) ◽  
pp. 6003-6006 ◽  
Author(s):  
M. Adamcyk ◽  
M. Beaudoin ◽  
I. Kelson ◽  
Y. Levy ◽  
T. Tiedje

2002 ◽  
Vol 80 (14) ◽  
pp. 2607-2609 ◽  
Author(s):  
C. Kaiser ◽  
Y. Levy ◽  
T. Tiedje ◽  
Jeff F. Young ◽  
I. Kelson

1999 ◽  
Vol 201-202 ◽  
pp. 26-30 ◽  
Author(s):  
M. Beaudoin ◽  
M. Adamcyk ◽  
Y. Levy ◽  
J.A. MacKenzie ◽  
S. Ritchie ◽  
...  

1987 ◽  
Vol 35 (2) ◽  
pp. 467-478 ◽  
Author(s):  
I. Kumabe ◽  
Y. Mito ◽  
M. Hyakutake ◽  
N. Koori ◽  
H. Sakai ◽  
...  

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