Measured element phase-shifting interferometry with a single piezoelectric transducer and low-friction workbench

2020 ◽  
Vol 126 ◽  
pp. 105847
Author(s):  
Shuai Yang ◽  
Weiqian Zhao ◽  
Peijie Zhang ◽  
Xin Xu ◽  
Lirong Qiu ◽  
...  
2016 ◽  
Vol 24 (9) ◽  
pp. 2167-2172 ◽  
Author(s):  
赵维谦 ZHAO Wei-qian ◽  
李文宇 LI Wen-yu ◽  
赵 齐 ZHAO Qi ◽  
邱丽荣 QIU Li-rong ◽  
王 允 WANG Yun

2000 ◽  
Vol 39 (4) ◽  
pp. 585 ◽  
Author(s):  
Xin Chen ◽  
Maureen Gramaglia ◽  
John A. Yeazell

2006 ◽  
Vol 450 (1) ◽  
pp. 415-425 ◽  
Author(s):  
S. Rabien ◽  
F. Eisenhauer ◽  
R. Genzel ◽  
R. I. Davies ◽  
T. Ott

Sign in / Sign up

Export Citation Format

Share Document