A molecular dynamics simulation of cluster dissociation process under cluster ion implantation

Physica B Condensed Matter ◽

10.1016/j.physb.2003.09.193 ◽

2003 ◽

Vol 340-342 ◽

pp. 1036-1040 ◽

Author(s):

Yasuhiro Hada

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Dissociation Process ◽

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Molecular dynamics simulation of cluster-ion fragmentation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(94)96083-6 ◽

1994 ◽

Vol 88 (1-2) ◽

pp. 74-80 ◽

Author(s):

J.D. Weinstein ◽

R.T. Fisher ◽

S. Vasanawala ◽

M.H. Shapiro ◽

T.A. Tombrello

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Dynamics Simulation ◽

Ion Fragmentation ◽

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Molecular dynamics simulation of ultra-precision machining 3C-SiC assisted by ion implantation

Journal of Manufacturing Processes ◽

10.1016/j.jmapro.2021.07.055 ◽

2021 ◽

Vol 69 ◽

pp. 398-411

Author(s):

Houfu Dai ◽

Yang Hu ◽

Weilong Wu ◽

Haixia Yue ◽

Xiaosong Meng ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Precision Machining ◽

Ultra Precision

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An electronic stopping power model for Monte Carlo and molecular dynamics simulation of ion implantation into silicon

Proceedings of 11th International Conference on Ion Implantation Technology ◽

10.1109/iit.1996.586437 ◽

2002 ◽

Author(s):

D. Cai ◽

N. Gronbech-Jensen ◽

C.M. Snell ◽

K.M. Beardmore ◽

Al.F. Tasch ◽

...

Keyword(s):

Molecular Dynamics ◽

Monte Carlo ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Stopping Power ◽

Power Model ◽

Electronic Stopping Power

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Fluorine plasma ion implantation in AlGaN∕GaN heterostructures: A molecular dynamics simulation study

Applied Physics Letters ◽

10.1063/1.2896646 ◽

2008 ◽

Vol 92 (10) ◽

pp. 102109 ◽

Author(s):

L. Yuan ◽

M. J. Wang ◽

K. J. Chen

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Simulation Study ◽

Dynamics Simulation

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Molecular dynamics simulation of helium ion implantation into silicon and its migration

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2019.06.034 ◽

2019 ◽

Vol 456 ◽

pp. 53-59 ◽

Author(s):

Lei Liu ◽

Zongwei Xu ◽

Rongrong Li ◽

Rui Zhu ◽

Jun Xu ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

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An electric stopping power model for Monte Carlo and molecular dynamics simulation of ion implantation into silicon

10.2172/276925 ◽

1996 ◽

Author(s):

D. Cai ◽

N. Gronbech-Jensen ◽

C.M. Snell ◽

K.M. Beardmore ◽

S. Morris ◽

...

Keyword(s):

Molecular Dynamics ◽

Monte Carlo ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Stopping Power ◽

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Molecular dynamics simulation of argon cluster ion collisions with argon atoms

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2020.05.004 ◽

2020 ◽

Vol 476 ◽

pp. 14-25

Author(s):

V.V. Sirotkin

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Dynamics Simulation ◽

Ion Collisions ◽

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Molecular dynamics simulation of fluorine cluster ion impact

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(99)01146-5 ◽

2000 ◽

Vol 164-165 ◽

pp. 546-552 ◽

Author(s):

Takaaki Aoki ◽

Jiro Matsuo ◽

Isao Yamada

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Dynamics Simulation ◽

Cluster Ion ◽

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Molecular dynamics simulation of ion implantation into hafnium dioxide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2004.08.003 ◽

2004 ◽

Vol 226 (4) ◽

pp. 537-542 ◽

Author(s):

Huihui Ji ◽

Min Yu ◽

Hao Shi ◽

Xiaokang Shi ◽

Ru Huang ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Hafnium Dioxide ◽

Dynamics Simulation

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Molecular dynamics simulation on the dissociation process of methane hydrates

Molecular Simulation ◽

10.1080/08927020701528524 ◽

2007 ◽

Vol 33 (12) ◽

pp. 1005-1016 ◽

Author(s):

L. Y. Ding ◽

C. Y. Geng ◽

Y. H. Zhao ◽

H. Wen

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Dynamics Simulation ◽

Methane Hydrates ◽

Dissociation Process

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