An electric stopping power model for Monte Carlo and molecular dynamics simulation of ion implantation into silicon
Keyword(s):
1996 ◽
Vol 54
(23)
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pp. 17147-17157
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Keyword(s):
2018 ◽
Vol 20
(18)
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pp. 12390-12395
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1999 ◽
Vol 11
(10A)
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pp. A47-A55
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Keyword(s):
2001 ◽
Vol 11
(1)
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pp. 17-28
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2015 ◽
Vol 142
(14)
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pp. 144111
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2001 ◽
Vol 308
(5)
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pp. 907-917
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