Fluorine plasma ion implantation in AlGaN∕GaN heterostructures: A molecular dynamics simulation study

2008 ◽  
Vol 92 (10) ◽  
pp. 102109 ◽  
Author(s):  
L. Yuan ◽  
M. J. Wang ◽  
K. J. Chen
Sign in / Sign up

Export Citation Format

Share Document