Molecular dynamics simulation of ultra-precision machining 3C-SiC assisted by ion implantation

Journal of Manufacturing Processes ◽

10.1016/j.jmapro.2021.07.055 ◽

2021 ◽

Vol 69 ◽

pp. 398-411

Author(s):

Houfu Dai ◽

Yang Hu ◽

Weilong Wu ◽

Haixia Yue ◽

Xiaosong Meng ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Precision Machining ◽

Ultra Precision

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Frontiers of Mechanical Engineering ◽

10.1007/s11465-017-0412-7 ◽

2017 ◽

Vol 12 (1) ◽

pp. 89-98 ◽

Author(s):

Xiaoguang Guo ◽

Qiang Li ◽

Tao Liu ◽

Renke Kang ◽

Zhuji Jin ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Brittle Materials ◽

Dynamics Simulation ◽

Precision Machining ◽

Hard And Brittle Materials ◽

Ultra Precision

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An electronic stopping power model for Monte Carlo and molecular dynamics simulation of ion implantation into silicon

Proceedings of 11th International Conference on Ion Implantation Technology ◽

10.1109/iit.1996.586437 ◽

2002 ◽

Author(s):

D. Cai ◽

N. Gronbech-Jensen ◽

C.M. Snell ◽

K.M. Beardmore ◽

Al.F. Tasch ◽

...

Keyword(s):

Molecular Dynamics ◽

Monte Carlo ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Stopping Power ◽

Power Model ◽

Electronic Stopping Power

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Fluorine plasma ion implantation in AlGaN∕GaN heterostructures: A molecular dynamics simulation study

Applied Physics Letters ◽

10.1063/1.2896646 ◽

2008 ◽

Vol 92 (10) ◽

pp. 102109 ◽

Author(s):

L. Yuan ◽

M. J. Wang ◽

K. J. Chen

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Simulation Study ◽

Dynamics Simulation

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Molecular dynamics simulation of the precision machining process including radiative and convective heat transfer mechanisms

Modelling and Simulation in Materials Science and Engineering ◽

10.1088/0965-0393/2/2/004 ◽

1994 ◽

Vol 2 (2) ◽

pp. 223-237 ◽

Author(s):

J A Patten ◽

K Flurchick ◽

J Beeler ◽

J Strenkowski

Keyword(s):

Heat Transfer ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Convective Heat Transfer ◽

Convective Heat ◽

Machining Process ◽

Dynamics Simulation ◽

Precision Machining ◽

Transfer Mechanisms

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Molecular dynamics simulation of helium ion implantation into silicon and its migration

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2019.06.034 ◽

2019 ◽

Vol 456 ◽

pp. 53-59 ◽

Author(s):

Lei Liu ◽

Zongwei Xu ◽

Rongrong Li ◽

Rui Zhu ◽

Jun Xu ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

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An electric stopping power model for Monte Carlo and molecular dynamics simulation of ion implantation into silicon

10.2172/276925 ◽

1996 ◽

Author(s):

D. Cai ◽

N. Gronbech-Jensen ◽

C.M. Snell ◽

K.M. Beardmore ◽

S. Morris ◽

...

Keyword(s):

Molecular Dynamics ◽

Monte Carlo ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Stopping Power ◽

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Molecular dynamics simulation of ion implantation into hafnium dioxide

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2004.08.003 ◽

2004 ◽

Vol 226 (4) ◽

pp. 537-542 ◽

Author(s):

Huihui Ji ◽

Min Yu ◽

Hao Shi ◽

Xiaokang Shi ◽

Ru Huang ◽

...

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Hafnium Dioxide ◽

Dynamics Simulation

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A molecular dynamics simulation of cluster dissociation process under cluster ion implantation

Physica B Condensed Matter ◽

10.1016/j.physb.2003.09.193 ◽

2003 ◽

Vol 340-342 ◽

pp. 1036-1040 ◽

Author(s):

Yasuhiro Hada

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Dynamics Simulation ◽

Dissociation Process ◽

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Molecular dynamics simulation of silicon vacancy defects in silicon carbide by hydrogen ion implantation and subsequent annealing

Diamond and Related Materials ◽

10.1016/j.diamond.2021.108595 ◽

2021 ◽

pp. 108595

Author(s):

Yexin Fan ◽

Zongwei Xu ◽

Ying Song ◽

Tianze Sun

Keyword(s):

Molecular Dynamics ◽

Silicon Carbide ◽

Molecular Dynamics Simulation ◽

Ion Implantation ◽

Subsequent Annealing ◽

Hydrogen Ion ◽

Dynamics Simulation ◽

Vacancy Defects ◽

Silicon Vacancy ◽

Hydrogen Ion Implantation

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A study on phase transformation of monocrystalline silicon due to ultra-precision polishing by molecular dynamics simulation

AIP Advances ◽

10.1063/1.4763462 ◽

2012 ◽

Vol 2 (4) ◽

pp. 042116 ◽

Author(s):

Lin Zhang ◽

Hongwei Zhao ◽

Zhichao Ma ◽

Hu Huang ◽

Chengli Shi ◽

...

Keyword(s):

Molecular Dynamics ◽

Phase Transformation ◽

Molecular Dynamics Simulation ◽

Monocrystalline Silicon ◽

Dynamics Simulation ◽

Ultra Precision

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