Modeling, fabrication, and characterization of SiC concentrically matched differential capacitance output pressure sensors
2018 ◽
Vol 273
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pp. 293-302
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2010 ◽
Vol 161
(1-2)
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pp. 29-38
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2013 ◽
Vol 14
(11)
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pp. 2003-2008
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2015 ◽
Vol 222
◽
pp. 322-328
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