Non-linear absorption of femtosecond laser pulses in a SiNx layer—influence of silicon doping type

2014 ◽  
Vol 120 ◽  
pp. 317-322 ◽  
Author(s):  
Gerrit Heinrich ◽  
Alexander Lawerenz
2010 ◽  
Author(s):  
Andrei A. Ionin ◽  
Sergei I. Kudryashov ◽  
Yurii N. Ponomarev ◽  
Leonid V. Seleznev ◽  
Dmitry V. Sinitsyn ◽  
...  

2016 ◽  
Vol 13 (3) ◽  
pp. 035302 ◽  
Author(s):  
Stanislav G Bezhanov ◽  
Pavel N Danilov ◽  
Andrey A Ionin ◽  
Sergey I Kudryashov ◽  
Vasiliy N Lednev ◽  
...  

2009 ◽  
Vol 48 (10) ◽  
pp. 1828 ◽  
Author(s):  
Lucas M. Naveira ◽  
Benjamin D. Strycker ◽  
Jieyu Wang ◽  
Gombojav O. Ariunbold ◽  
Alexei V. Sokolov ◽  
...  

Author(s):  
S. Vukelic ◽  
B. Gao ◽  
S. Ryu ◽  
Y. L. Yao

Non-linear absorption of femtosecond laser pulses enables the induction of structural changes in the interior of bulk transparent materials without affecting their surface. This property can be exploited for the transmission welding of transparent dielectrics, three dimensional optical data storages and waveguides. In the present study, femtosecond laser pulses were tightly focused within the interior of bulk fused silica specimen. Localized plasma was formed, initiating rearrangement of the network structure. The change in material properties were studied through employment of spatially resolved Raman spectroscopy, atomic force microscopy and optical microscopy. The nature of the physical mechanisms responsible for the alteration of material properties as a function of process parameters is discussed.


2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.


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