The effect of r.f. substrate bias on the properties of carbon nitride films produced by an inductively coupled plasma chemical vapor deposition
2005 ◽
Vol 193
(1-3)
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pp. 152-156
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2010 ◽
Vol 49
(3)
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pp. 03CA03
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2004 ◽
Vol 188-189
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pp. 440-445
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2015 ◽
Vol 7
(39)
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pp. 21884-21889
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2002 ◽
Vol 74
(1-4)
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pp. 97-105
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2014 ◽
Vol 67
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pp. 197-201
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