Numerical Simulation of Metal Plasma Immersion Ion Implantation (MePIIID) on a Sharp Cone and a Fine Tip by a Multiple-Grid Particle-in-Cell (PIC) Method

2006 ◽  
Vol 34 (5) ◽  
pp. 2434-2442 ◽  
Author(s):  
D.T.K. Kwok ◽  
C. Cornet
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation ◽  
Sharp Cone ◽  
Pic Method

Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5458-5462 ◽  
Author(s):  
Y.X. Huang ◽  
X.B. Tian ◽  
S.Q. Yang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma

Numerical simulation of metal plasma-immersion ion implantation and deposition on a cone

2004 ◽  
Vol 96 (11) ◽  
pp. 6045-6052 ◽  
Author(s):  
Christophe Cornet ◽  
Dixon T. K. Kwok ◽  
M. M. M. Bilek ◽  
D. R. McKenzie
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation
Sign in / Sign up

Export Citation Format

Share Document