Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

2010 ◽  
Vol 43 (9) ◽  
pp. 095203 ◽  
Author(s):  
Dixon T K Kwok ◽  
Jianhui Li ◽  
Xiaobo Ma ◽  
Paul K Chu
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Electron Distribution ◽  
Three Dimensional ◽  
Hybrid Particle ◽  
Particle In Cell ◽  
Three Dimensional Objects ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation

Control of implantation area in direct-current plasma immersion ion implantation (DC-PIII)

2003 ◽  
Vol 31 (3) ◽  
pp. 356-361 ◽  
Author(s):  
R.K. Fu ◽  
Pai Peng ◽  
Xuchu Zeng ◽  
D.T. Kwok ◽  
P.K. Chu
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation

Quasi-direct current plasma immersion ion implantation

2001 ◽  
Vol 79 (19) ◽  
pp. 3044-3046 ◽  
Author(s):  
Xuchu Zeng ◽  
Ricky K. Y. Fu ◽  
Dixon T. K. Kwok ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation

Non-Uniformity of Ion Implantation in Direct-Current Plasma Immersion Ion Implantation

2010 ◽  
Vol 27 (7) ◽  
pp. 075201
Author(s):  
Liu Cheng-Sen ◽  
Wang De-Zhen ◽  
Fan Yu-Jia ◽  
Zhang Nan ◽  
Guan Li ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Direct Current ◽  
Direct Current Plasma ◽  
Plasma Immersion Ion Implantation
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