Plasma diagnostics of hybrid magnetron sputtering and pulsed laser deposition

2006 ◽  
Vol 201 (7) ◽  
pp. 4040-4045 ◽  
Author(s):  
J.G. Jones ◽  
C. Muratore ◽  
A.R. Waite ◽  
A.A. Voevodin
Keyword(s):  
Magnetron Sputtering ◽  
Pulsed Laser Deposition ◽  
Plasma Diagnostics ◽  
Pulsed Laser ◽  
Laser Deposition

Understanding pulsed laser deposition process of copper halides via plasma diagnostics techniques

2021 ◽  
Vol 130 (24) ◽  
pp. 243302
Author(s):  
Stefan Andrei Irimiciuc ◽  
Sergii Chertopalov ◽  
Michal Novotný ◽  
Valentin Craciun ◽  
Jan Lancok
Keyword(s):  
Pulsed Laser Deposition ◽  
Plasma Diagnostics ◽  
Pulsed Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Copper Halides

Comparative Characteristics of Na 0.5 K 0.5 NbO 3 Films on Pt by Pulsed Laser Deposition and Magnetron Sputtering

2003 ◽  
Vol 55 (1) ◽  
pp. 769-779 ◽  
Author(s):  
Sergey Khartsev ◽  
Alex Grishin ◽  
Johanna Andrèasson ◽  
Jung-Hyuk Koh ◽  
Jae-Sung Song
Keyword(s):  
Magnetron Sputtering ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

scholarly journals Combined magnetron sputtering and pulsed laser deposition of TiO 2 and BFCO thin films

2017 ◽  
Vol 7 (1) ◽  
Author(s):  
D. Benetti ◽  
R. Nouar ◽  
R. Nechache ◽  
H. Pepin ◽  
A. Sarkissian ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition

Conformity of Aluminum Thin Films Deposited onto Micro-Patterned Silicon Wafers by Pulsed Laser Deposition, Magnetron Sputtering, and CVD

2011 ◽  
Vol 17 (10-12) ◽  
pp. 366-374 ◽  
Author(s):  
Anne-Lise Thomann ◽  
Constantin Vahlas ◽  
Lyacine Aloui ◽  
Diane Samelor ◽  
Amael Caillard ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Silicon Wafers ◽  
Laser Deposition

scholarly journals Plasma diagnostics in pulsed laser deposition of GaLaS chalcogenides

2013 ◽  
Vol 278 ◽  
pp. 352-356 ◽  
Author(s):  
O.G. Pompilian ◽  
S. Gurlui ◽  
P. Nemec ◽  
V. Nazabal ◽  
M. Ziskind ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Plasma Diagnostics ◽  
Pulsed Laser ◽  
Laser Deposition
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