The influence of the magnetic field configuration on plasma parameters and microstructure of niobium nitride films
2007 ◽
Vol 201
(13)
◽
pp. 6117-6121
◽
Keyword(s):
1971 ◽
Vol 43
◽
pp. 243-248
◽
1998 ◽
Vol 164
◽
pp. 115-116
◽
Keyword(s):
1990 ◽
Vol 140
◽
pp. 54-54
Keyword(s):
2010 ◽
Vol 6
(S274)
◽
pp. 398-400